Methoden und Sensoren zur überwachung von Handhabungs-und Fügeprozessen in der Mikrosystemtechnik (Methods and Sensors for the Control of Handling and Assembly Processes in Microtechnology)
Author: | Sascha Driessen, Bastian Engelmann |
---|---|
Parent Title (English): | tm - Technisches Messen |
Document Type: | Article |
Language: | English |
Year of publication: | 2004 |
Release Date: | 2023/08/17 |
Volume: | 71 |
Issue: | 7-8 |
Pages/Size: | 13 |
First Page: | 404 |
Last Page: | 416 |