Advanced comparator method for measuring ultra small aperture areas
| Author: | Jürgen Hartmann |
|---|---|
| Parent Title (English): | Meas.Sci.Techn. |
| Document Type: | Article |
| Language: | English |
| Year of publication: | 2001 |
| Release Date: | 2017/08/24 |
| Issue: | 12 |
| First Page: | 1678 |
| Last Page: | 1682 |
| Faculties and institutes: | Fakultäten / Fakultät Elektrotechnik |
