TY - JOUR A1 - Hartmann, Jürgen T1 - The composition analysis of YBa2Cu3O7-δ or PrBa2Cu3O7-δ thin films and (YBa2Cu3O7-δ/PrBa2Cu3O7-δ) n heterostructures prepared by CVD JF - Fresenius' journal of analytical chemistry N2 - Some YBa2Cu3O7-δ films and heterostructures prepared by Chemical Vapor Deposition (CVD) were analyzed in our laboratories by EPMA-EDX or WDX, RBS, SNMS and AES. It was found that in some cases the results of composition analysis can significantly deviate from each other. At least two main reasons for these deviations exist: the different lateral resolution and the application of different reference samples for the calibration. Y1 - 1997 UR - https://link.springer.com/article/10.1007/s002160050305 VL - 357 IS - 8 SP - 1061 EP - 1065 ER -