TY - JOUR A1 - Schmitt, Robert A1 - Dietrich, Björn A1 - Hafner, Philip A1 - Engelmann, Bastian T1 - Messstrategien für die zerstörungsfreie Schichtmessung mittels Ultraschallmikroskopie Strategies for the Non-Destructive Characterization of Thin Layers with Scanning Acoustic Microscopy JF - tm - Technisches Messen Y1 - 2008 VL - 75 IS - 11 SP - 577 EP - 585 ER - TY - JOUR A1 - Schmitt, Robert A1 - Hafner, Philip A1 - Engelmann, Bastian T1 - Strategies for the non-destructive characterization of thin layers with Scanning Acoustic Microscopy JF - tm - Technisches Messen Y1 - 2007 VL - 74 IS - 6 SP - 365 EP - 373 ER - TY - JOUR A1 - Pfeifer, Tilo A1 - Benz, Manfred A1 - Engelmann, Bastian A1 - Hafner, Philip T1 - High precision ultrasonic on-machine measurement JF - Measurement Y1 - 2006 VL - 39 IS - 5 SP - 407 EP - 414 ER -