TY - JOUR A1 - Pfeifer, Tilo A1 - Engelmann, Bastian T1 - Strategies for the surface measurement with a confocal laserscanning-microscope JF - Tagungsband zur Konferenz IX. Internationales Oberflächenkolloquium in Chemnitz Y1 - 2004 SP - 249 EP - 257 ER - TY - JOUR A1 - Pfeifer, Tilo A1 - Dussler, G A1 - Engelmann, Bastian T1 - Visualisierungsmethoden für Mikrostrukturen mit dem konfokalen Laser-Scanning-Mikroskop JF - VDI-Berichte Y1 - 2003 SP - 175 EP - 185 ER - TY - JOUR A1 - Pfeifer, Tilo A1 - Benz, Manfred A1 - Engelmann, Bastian A1 - Hafner, Philip T1 - High precision ultrasonic on-machine measurement JF - Measurement Y1 - 2006 VL - 39 IS - 5 SP - 407 EP - 414 ER - TY - CHAP A1 - Bosse, L A1 - Driessen, Sascha A1 - Engelmann, Bastian A1 - Gillner, A A1 - Poprawe, R A1 - Pfeifer, Tilo A1 - Schmitt, Robert T1 - Inline-Verfahren T2 - Montage hybrider Mikrosysteme: Handhabungs-und Fügetechniken für die Klein-und Mittelserienfertigung Y1 - 2005 U6 - https://doi.org/10.1007/3-540-27536-3_16 SP - 187 EP - 218 ER - TY - CHAP A1 - Pfeifer, Tilo A1 - Schmitt, Robert A1 - Driessen, Sascha A1 - Engelmann, Bastian T1 - Offline-Verfahren T2 - Montage hybrider Mikrosysteme: Handhabungs-und Fügetechniken für die Klein-und Mittelserienfertigung Y1 - 2005 U6 - https://doi.org/10.1007/3-540-27536-3_15 SP - 175 EP - 186 ER - TY - CHAP A1 - Pfeifer, Tilo A1 - Driessen, Sascha A1 - Engelmann, Bastian T1 - Control of the Assembly of Hybrid Micro Systems T2 - Conference Proceeding of Photonics in Measurement Y1 - 2004 SP - 357 EP - 368 ER - TY - CHAP A1 - Pfeifer, Tilo A1 - Dussler, G. A1 - Engelmann, Bastian T1 - Methods and sensors for the observation of micro assembly T2 - Conference Proceeding of Micro System 2003 in Munich Y1 - 2003 SP - 139 EP - 145 ER - TY - CHAP A1 - Pfeifer, Tilo A1 - Engelmann, Bastian T1 - Process observation of the assembly of hybrid microsystems T2 - Conference Proceeding of 12th International Conference on Experimental Mechanics in Bari Y1 - 2004 ER - TY - CHAP A1 - Pfeifer, Tilo A1 - Driessen, Sascha A1 - Engelmann, Bastian T1 - Control for the Assembly of Micro Systems T2 - Conference Proceeding of 8th International Symposium on Measurement and Quality Control in Production in Erlangen Y1 - 2004 SP - 603 EP - 608 ER -