TY - JOUR A1 - Hartmann, Jürgen A1 - Moritz, W. A1 - Roth, U. A1 - Heyde, M. A1 - Rademann, K. A1 - Reichling, M. T1 - Submicrosecond range surface heating and temperature measurement for efficient sensor reactivation JF - Thin Solid Films Y1 - 2001 UR - http://permalink.bibkatalog.de/BV013351743 IS - 391 SP - 143 EP - 148 ER - TY - CHAP A1 - Hartmann, Jürgen A1 - Roth, U. A1 - Moritz, W. A1 - Reichling, M. ED - Scudieri, F. ED - Bertolotti, M. T1 - Optimised strategies for thermal re-activation of LaF3/Pt-sensors based on photothermal characterisation BT - AIP Conference Proceedings 463 T2 - Photoacoustic and Photothermal Phenomena Y1 - 1999 SP - 398 EP - 400 CY - Woodbury (New York) ER - TY - CHAP A1 - Hartmann, Jürgen A1 - Moritz, W. A1 - Roth, U. A1 - Heyde, M. A1 - Rademann, K. A1 - Reichling, M. T1 - Nanosecond Range Heating and Temperature Measurement on Thin Layers BT - Experiment and Simulation T2 - Proceedings of the International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators N2 - A chemical semiconductor sensor for oxygen gas was activated by thermal treatment. The thin Pt layer of the n-Si/SiO2/Si3N4/LaF3/Pt field effect structure was used as the gate electrode for sensitivity measurements, heating resistance and temperature sensor. Taking advantage of using the gate electrode for heating only the sensitive two layer system LaF3/Pt (thickness only 300 nm) has to be at high temperature. The reactivation was shown to be a very fast process. Within a period of 10µs the structure was heated and the activation process was completed. The temperature measurement was done using the voltage drop at the gate and the current of the heating impulse. For the temperature measurement a resolution on the time scale of nanoseconds was achieved. The time dependent temperature distribution in the sensor multi layer structure was simulated using the CFD-ACE+ software of CFDRC. For the µs-impulses the temperature increase of only the thin layers and not the silicon bulk was shown. Y1 - 1999 UR - https://www.researchgate.net/profile/Juergen_Hartmann3/publication/238109507_Nanosecond_Range_Heating_and_Temperature_Measurement_on_Thin_Layers_Experiment_and_Simulation/links/0a85e52e8b51b9126e000000/Nanosecond-Range-Heating-and-Temperature-Measurement-on-Thin-Layers-Experiment-and-Simulation.pdf SP - 655 EP - 658 PB - MSM 99 ER -