<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1548</id>
    <completedYear/>
    <publishedYear>2013</publishedYear>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Projektionsobjektiv für EUV-Mikrolithographie</title>
    <subTitle language="deu">Folienelement und Verfahren zur Herstellung eines Projektionsobjektivs mit Folienelement</subTitle>
    <author>Boris Bittner</author>
    <author>N. Wabra</author>
    <author>S. Schneider</author>
    <author>R. Schneider</author>
    <author>H. Wagner</author>
    <author>C. Wald</author>
    <author>R. Iliew</author>
    <author>T. Schicketanz</author>
    <author>T. Gruner</author>
    <collection role="institutes" number="fang">Fakultät für angewandte Natur- und Geisteswissenschaften</collection>
    <collection role="Autoren" number="bittner">Boris Bittner</collection>
  </doc>
</export-example>
