@article{BittnerZellnerWabraetal., author = {Bittner, Boris and Zellner, J. and Wabra, N. and von Hodenberg, M. and Schneider, S. and Schneider, R. and Schob, A. and Rudolph, G. and Gratzke, A. and Moffat, A.}, title = {Projection objective of a mcrolithographic projection exposure apparatus}, language = {en} }