@article{BittnerWeissKerwienetal., author = {Bittner, Boris and Weiß, M. and Kerwien, N. and Weiser, M. and Wabra, N. and Schlichenmaier, Chr. and Clauss, W.}, title = {Reflective optical element for the EUV wavelength range, method for producing and correcting such an element, projection lens for microlithography comprising such an element, and projection exposure apparatus for microlithography comprising such a projection lens}, language = {en} }