@article{BittnerWabraSchneideretal., author = {Bittner, Boris and Wabra, N. and Schneider, S. and Schneider, R. and Wagner, H. and Wald, C. and Iliew, R. and Schicketanz, T. and Gruner, T.}, title = {Projektionsobjektiv f{\"u}r EUV-Mikrolithographie}, language = {de} }