@inproceedings{PfeiferDusslerEngelmann, author = {Pfeifer, Tilo and Dussler, G. and Engelmann, Bastian}, title = {Methods and sensors for the observation of micro assembly}, series = {Conference Proceeding of Micro System 2003 in Munich}, booktitle = {Conference Proceeding of Micro System 2003 in Munich}, pages = {139 -- 145}, language = {en} } @article{PfeiferDusslerEngelmann, author = {Pfeifer, Tilo and Dussler, G and Engelmann, Bastian}, title = {Visualisierungsmethoden f{\"u}r Mikrostrukturen mit dem konfokalen Laser-Scanning-Mikroskop}, series = {VDI-Berichte}, journal = {VDI-Berichte}, pages = {175 -- 185}, language = {en} }