@article{BittnerZellnerWabraetal.2013, author = {Boris Bittner and J. Zellner and N. Wabra and M. von Hodenberg and S. Schneider and R. Schneider and A. Schob and G. Rudolph and A. Gratzke and A. Moffat}, title = {Projection objective of a mcrolithographic projection exposure apparatus}, year = {2013}, }