TY - CONF A1 - Pfeifer, Tilo A1 - Engelmann, Bastian T1 - Process observation of the assembly of hybrid microsystems T2 - Conference Proceeding of 12th International Conference on Experimental Mechanics in Bari Y1 - 2004 UR - https://opus4.kobv.de/opus4-fhws/frontdoor/index/index/docId/3885 ER -