TY - CONF A1 - Pfeifer, Tilo A1 - Driessen, Sascha A1 - Engelmann, Bastian T1 - Control of the Assembly of Hybrid Micro Systems T2 - Conference Proceeding of Photonics in Measurement Y1 - 2004 UR - https://opus4.kobv.de/opus4-fhws/frontdoor/index/index/docId/3884 SP - 357 EP - 368 ER -