@article{DriessenEngelmann2004, author = {Sascha Driessen and Bastian Engelmann}, title = {Methoden und Sensoren zur {\"u}berwachung von Handhabungs-und F{\"u}geprozessen in der Mikrosystemtechnik (Methods and Sensors for the Control of Handling and Assembly Processes in Microtechnology)}, journal = {tm - Technisches Messen}, volume = {71}, number = {7-8}, pages = {404 -- 416}, year = {2004}, }