@article{Hartmann2001, author = {Hartmann, J{\"u}rgen}, title = {Advanced comparator method for measuring ultra small aperture areas}, journal = {Meas.Sci.Techn.}, number = {12}, institution = {Fakult{\"a}t Elektrotechnik}, pages = {1678 -- 1682}, year = {2001}, language = {en} }