IR Imaging of Mircosystems: Special Requirements, Experiments and Applications

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Author:Klaus-Peter Möllmann, Michael Vollmer
Parent Title (English):In: Sensor + Test Conferences 2011 : Nürnberg Exhibition Centre, Germany, 7. - 9.6.2011 ; [including] SENSOR 2011, 15th International Conference on Sensors and Measurement Technology, OPTO 2011, photonic metrology, 10th International Conference on Optical Technologies for Sensing and Measurement, IRS2 2011, 12th International Conference on Infrared Sensors & Systems ; short proceedings / AMA Fachverband für Sensorik e.V. - Wunstorf/Germany : AMA Service GmbH, 2011. - ISBN 978-3-9810993-8-6
Document Type:Conference Proceeding
Language:English
Year of Publishing:2011
Date of Publication (online):2014/01/24
Release Date:2014/01/24
First Page:236
Institutes:Fachbereich Technik
University Bibliography:Hochschulbibliographie
Licence (German):Creative Commons - Namensnennung, Nicht kommerziell, Keine Bearbeitung