Technology towards a SAW based phononic crystal sensor
Author: | Marc-Peter Schmidt, Aleksandr Oseev, Ralf Lucklum, Sören Hirsch |
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URL: | http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2178810 |
DOI: | https://doi.org/10.1117/12.2178810 |
Parent Title (English): | Konferenz: SPIE Microtechnologies, Barcelona, Spain, 2015/ Titel: PROCEEDINGS VOLUME 9517 SPIE MICROTECHNOLOGIES | 4-6 MAY 2015 Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems |
Editor: | José Luis Sánchez-Rojas, Riccardo Brama |
Document Type: | Conference Proceeding |
Language: | English |
Year of Publishing: | 2015 |
Date of Publication (online): | 2024/02/14 |
Release Date: | 2024/02/19 |
Institutes: | Fachbereich Technik |
University Bibliography: | Hochschulbibliografie |
Licence (German): | Creative Commons - CC BY - Namensnennung 4.0 |