SAW based phononic crystal sensor, technological challenges and solutions
Author: | Marc-Peter Schmidt, Aleksandr Oseev, Ralf Lucklum, Mikhail Zubtsov, Sören Hirsch |
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URL: | http://link.springer.com/10.1007/s00542-015-2781-3 |
DOI: | https://doi.org/10.1007/s00542-015-2781-3 |
ISSN: | 0946-7076, 1432-1858 |
Parent Title (English): | Microsystem Technologies |
Publisher: | Springer Link |
Document Type: | Article |
Language: | English |
Year of Publishing: | 2016 |
Date of Publication (online): | 2024/02/14 |
Publishing Institution: | Technische Hochschule Brandenburg |
Release Date: | 2024/02/19 |
Page Number: | 7 |
First Page: | 1593 |
Last Page: | 1599 |
Institutes: | Fachbereich Technik |
University Bibliography: | Hochschulbibliografie |
Licence (German): | Creative Commons - CC BY - Namensnennung 4.0 |