TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS) N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate. Y1 - 2016 UR - http://ieeexplore.ieee.org/document/7728788/ SN - 978-1-4673-9897-8 U6 - https://doi.org/10.1109/ULTSYM.2016.7728788 SP - 1 EP - 4 PB - IEEE CY - Tours, France ER - TY - CHAP A1 - Fomina, Marina A. A1 - Koshuro, Vladimir A. A1 - Fomin, Aleksandr A. A1 - Rodionov, Igor V. A1 - Skaptsov, Aleksandr A. A1 - Zakharevich, Andrey M. A1 - Aman, Alexander A1 - Oseev, Aleksandr A1 - Hirsch, Sören A1 - Majcherek, Soeren ED - Tuchin, Valery V. ED - Derbov, Vladimir L. ED - Postnov, Dmitry E. ED - Meglinski, Igor V. ED - Larin, Kirill V. ED - Pravdin, Alexander B. ED - Genina, Elina A. T1 - Peculiarities of structure formation of layered metal-oxide system Ti-Ta-(Ti,Ta) x O y during electro-spark alloying and thermally stimulated modification T2 - Konferenz: Saratov, Russian Federation/ Titel: PROCEEDINGS VOLUME 9917 SARATOV FALL MEETING 2015 | 22-25 SEPTEMBER 2015 Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS) N2 - The study focuses on high-performance combined electro-spark alloying of titanium and titanium alloy (VT1-0, VT16) surface and porous matrix structure oxidation. The metal-oxide coatings morphology is the result of melt drop transfer, heat treatment, and oxidation. The study establishes the influence of technological regimes of alloying and oxidation on morphological heterogeneity of biocompatible layered metal-oxide system Ti-Ta-(Ti,Ta)xOy. It was found that during electro-spark alloying the concentration of tantalum on the titanium surface ranges from 0.1 to 3.2 at.%. Morphology of the deposited splats is represented by uniformly grown crystals of titanium and tantalum oxides, which increase from nano- to submicron size. Y1 - 2016 UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2229491 U6 - https://doi.org/10.1117/12.2229491 PB - SPIE. Digital Library CY - Saratov, Russian Federation ER - TY - JOUR A1 - Aman, A. A1 - Majcherek, Soeren A1 - Schmidt, M. P. A1 - Orseev, A. A1 - Engel, C. A1 - Hirsch, Sören T1 - Behavior of Current Flow on Lead Zirconate Titanate Surfaces during Mechanical Impact JF - Research & Reviews: Journal of Material Sciences Y1 - 2016 UR - http://www.rroij.com/open-access/behavior-of-current-flow-on-lead-zirconate-titanate-surfacesduring-mechanical-impact-.php?aid=69107 U6 - https://doi.org/10.4172/2321-6212.1000137 SN - 23216212 IS - Ausgabe: 1/ Band: 4 PB - Research and Reviews ER -