TY - JOUR A1 - Hirsch, Sören A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Engel, Christian A1 - Brose, Andreas A1 - Schmidt, Bertram T1 - Flexible free-standing SU-8 microfluidic impedancespectroscopy sensor for 3-D molded interconnectdevices application JF - Journal of Sensors and Sensor Systems Y1 - 2016 U6 - https://doi.org/10.5194/jsss-5-55-2016 VL - 5 IS - 1 SP - 55 EP - 61 ER - TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS) N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate. Y1 - 2016 UR - http://ieeexplore.ieee.org/document/7728788/ SN - 978-1-4673-9897-8 U6 - https://doi.org/10.1109/ULTSYM.2016.7728788 SP - 1 EP - 4 PB - IEEE CY - Tours, France ER - TY - CHAP A1 - Fomina, Marina A. A1 - Koshuro, Vladimir A. A1 - Fomin, Aleksandr A. A1 - Rodionov, Igor V. A1 - Skaptsov, Aleksandr A. A1 - Zakharevich, Andrey M. A1 - Aman, Alexander A1 - Oseev, Aleksandr A1 - Hirsch, Sören A1 - Majcherek, Soeren ED - Tuchin, Valery V. ED - Derbov, Vladimir L. ED - Postnov, Dmitry E. ED - Meglinski, Igor V. ED - Larin, Kirill V. ED - Pravdin, Alexander B. ED - Genina, Elina A. T1 - Peculiarities of structure formation of layered metal-oxide system Ti-Ta-(Ti,Ta) x O y during electro-spark alloying and thermally stimulated modification T2 - Konferenz: Saratov, Russian Federation/ Titel: PROCEEDINGS VOLUME 9917 SARATOV FALL MEETING 2015 | 22-25 SEPTEMBER 2015 Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS) N2 - The study focuses on high-performance combined electro-spark alloying of titanium and titanium alloy (VT1-0, VT16) surface and porous matrix structure oxidation. The metal-oxide coatings morphology is the result of melt drop transfer, heat treatment, and oxidation. The study establishes the influence of technological regimes of alloying and oxidation on morphological heterogeneity of biocompatible layered metal-oxide system Ti-Ta-(Ti,Ta)xOy. It was found that during electro-spark alloying the concentration of tantalum on the titanium surface ranges from 0.1 to 3.2 at.%. Morphology of the deposited splats is represented by uniformly grown crystals of titanium and tantalum oxides, which increase from nano- to submicron size. Y1 - 2016 UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2229491 U6 - https://doi.org/10.1117/12.2229491 PB - SPIE. Digital Library CY - Saratov, Russian Federation ER - TY - JOUR A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Oseev, Aleksandr A1 - Schmidt, Marc-Peter A1 - Hirsch, Sören T1 - SAW Based Sandwich Phononic Crystal Sensor JF - Procedia Engineering N2 - Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip. Y1 - 2016 UR - https://linkinghub.elsevier.com/retrieve/pii/S1877705816335640 U6 - https://doi.org/10.1016/j.proeng.2016.11.251 SN - 18777058 IS - 168 SP - 700 EP - 703 PB - Elsevier ER - TY - JOUR A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal sensor, technological challenges and solutions JF - Microsystem Technologies Y1 - 2016 UR - http://link.springer.com/10.1007/s00542-015-2781-3 U6 - https://doi.org/10.1007/s00542-015-2781-3 SN - 0946-7076, 1432-1858 SP - 1593 EP - 1599 PB - Springer Link ER -