TY - JOUR
A1 - Hirsch, Sören
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Engel, Christian
A1 - Brose, Andreas
A1 - Schmidt, Bertram
T1 - Flexible free-standing SU-8 microfluidic impedancespectroscopy sensor for 3-D molded interconnectdevices application
JF - Journal of Sensors and Sensor Systems
Y1 - 2016
U6 - https://doi.org/10.5194/jsss-5-55-2016
VL - 5
IS - 1
SP - 55
EP - 61
ER -
TY - CHAP
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Hirsch, Sören
T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach
T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS)
N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate.
Y1 - 2016
UR - http://ieeexplore.ieee.org/document/7728788/
SN - 978-1-4673-9897-8
U6 - https://doi.org/10.1109/ULTSYM.2016.7728788
SP - 1
EP - 4
PB - IEEE
CY - Tours, France
ER -
TY - CHAP
A1 - Fomina, Marina A.
A1 - Koshuro, Vladimir A.
A1 - Fomin, Aleksandr A.
A1 - Rodionov, Igor V.
A1 - Skaptsov, Aleksandr A.
A1 - Zakharevich, Andrey M.
A1 - Aman, Alexander
A1 - Oseev, Aleksandr
A1 - Hirsch, Sören
A1 - Majcherek, Soeren
ED - Tuchin, Valery V.
ED - Derbov, Vladimir L.
ED - Postnov, Dmitry E.
ED - Meglinski, Igor V.
ED - Larin, Kirill V.
ED - Pravdin, Alexander B.
ED - Genina, Elina A.
T1 - Peculiarities of structure formation of layered metal-oxide system Ti-Ta-(Ti,Ta) x O y during electro-spark alloying and thermally stimulated modification
T2 - Konferenz: Saratov, Russian Federation/ Titel: PROCEEDINGS VOLUME 9917 SARATOV FALL MEETING 2015 | 22-25 SEPTEMBER 2015 Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS)
N2 - The study focuses on high-performance combined electro-spark alloying of titanium and titanium alloy (VT1-0, VT16) surface and porous matrix structure oxidation. The metal-oxide coatings morphology is the result of melt drop transfer, heat treatment, and oxidation. The study establishes the influence of technological regimes of alloying and oxidation on morphological heterogeneity of biocompatible layered metal-oxide system Ti-Ta-(Ti,Ta)xOy. It was found that during electro-spark alloying the concentration of tantalum on the titanium surface ranges from 0.1 to 3.2 at.%. Morphology of the deposited splats is represented by uniformly grown crystals of titanium and tantalum oxides, which increase from nano- to submicron size.
Y1 - 2016
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2229491
U6 - https://doi.org/10.1117/12.2229491
PB - SPIE. Digital Library
CY - Saratov, Russian Federation
ER -
TY - JOUR
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Oseev, Aleksandr
A1 - Schmidt, Marc-Peter
A1 - Hirsch, Sören
T1 - SAW Based Sandwich Phononic Crystal Sensor
JF - Procedia Engineering
N2 - Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip.
Y1 - 2016
UR - https://linkinghub.elsevier.com/retrieve/pii/S1877705816335640
U6 - https://doi.org/10.1016/j.proeng.2016.11.251
SN - 18777058
IS - 168
SP - 700
EP - 703
PB - Elsevier
ER -
TY - JOUR
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Hirsch, Sören
T1 - SAW based phononic crystal sensor, technological challenges and solutions
JF - Microsystem Technologies
Y1 - 2016
UR - http://link.springer.com/10.1007/s00542-015-2781-3
U6 - https://doi.org/10.1007/s00542-015-2781-3
SN - 0946-7076, 1432-1858
SP - 1593
EP - 1599
PB - Springer Link
ER -