TY - JOUR A1 - Oseev, Aleksandr A1 - Mukhin, Nikolay A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Schmidt, Marc-Peter A1 - Steinmann, Ulrike A1 - Fomin, Aleksandr A1 - Kozyrev, Andrey A1 - Hirsch, Sören T1 - Study of liquid resonances in solid-liquid composite periodic structures (phononic crystals) – theoretical investigations and practical application for in-line analysis of conventional petroleum products JF - Sensors and Actuators B: Chemical KW - Phononic crystal sensor KW - Periodic composite structure KW - Ultrasonic sensor KW - Gasoline sensor KW - Petroleum sensor KW - In-line fuel sensor Y1 - 2018 U6 - https://doi.org/10.1016/j.snb.2017.10.144 VL - 257 SP - 469 EP - 477 ER - TY - JOUR A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Schmidt, Marc-Peter A1 - Mukhin, Nikolay V. A1 - Hirsch, Soeren T1 - SAW-Based Phononic Crystal Microfluidic Sensor—Microscale Realization of Velocimetry Approaches for Integrated Analytical Platform Applications JF - Sensors KW - phononic crystal KW - liquid sensor KW - ultrasonic velocimetry KW - μTAS Y1 - 2017 U6 - https://doi.org/10.3390/s17102187 VL - 17 IS - 10 SP - 2187 ER - TY - JOUR A1 - Oseev, Aleksandr A1 - Mukhin, Nikolay V. A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Schmidt, Marc-Peter A1 - Redka, Dmitrii A1 - Kozyrev, Andrey A1 - Hirsch, Sören T1 - Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions JF - Microsystem Technologies Y1 - 2018 U6 - https://doi.org/10.1007/s00542-017-3616-1 VL - 24 IS - 5 SP - 2389 EP - 2399 ER - TY - CHAP A1 - Oseev, Aleksandr A1 - Schmidt, Marc-Peter A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - Phononic crystal based liquid sensor governed by localized defect resonances T2 - Konferenz: IEEE Symposium (IUS) Ultrasonics, 2015/ Titel: 2015 IEEE International Ultrasonics Symposium (IUS) Y1 - 2015 UR - http://ieeexplore.ieee.org/document/7329492/ SN - 978-1-4799-8182-3 U6 - https://doi.org/10.1109/ULTSYM.2015.0053 SP - 1 EP - 4 PB - IEEE CY - Taipei, Taiwan ER - TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS) N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate. Y1 - 2016 UR - http://ieeexplore.ieee.org/document/7728788/ SN - 978-1-4673-9897-8 U6 - https://doi.org/10.1109/ULTSYM.2016.7728788 SP - 1 EP - 4 PB - IEEE CY - Tours, France ER - TY - JOUR A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Oseev, Aleksandr A1 - Schmidt, Marc-Peter A1 - Hirsch, Sören T1 - SAW Based Sandwich Phononic Crystal Sensor JF - Procedia Engineering N2 - Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip. Y1 - 2016 UR - https://linkinghub.elsevier.com/retrieve/pii/S1877705816335640 U6 - https://doi.org/10.1016/j.proeng.2016.11.251 SN - 18777058 IS - 168 SP - 700 EP - 703 PB - Elsevier ER - TY - JOUR A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal sensor, technological challenges and solutions JF - Microsystem Technologies Y1 - 2016 UR - http://link.springer.com/10.1007/s00542-015-2781-3 U6 - https://doi.org/10.1007/s00542-015-2781-3 SN - 0946-7076, 1432-1858 SP - 1593 EP - 1599 PB - Springer Link ER -