TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS) N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate. Y1 - 2016 UR - http://ieeexplore.ieee.org/document/7728788/ SN - 978-1-4673-9897-8 U6 - https://doi.org/10.1109/ULTSYM.2016.7728788 SP - 1 EP - 4 PB - IEEE CY - Tours, France ER - TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Engel, C. A1 - Brose, Andreas A1 - Aman, Alexander A1 - Hirsch, Sören T1 - A Novel Design and Fabrication of Multichannel Microfluidic Impedance Spectroscopy Sensor for Intensive Electromagnetic Environment Application T2 - Konferenz: The 28th European Conference on Solid-State Transducers (EUROSENSORS)/ Titel: Procedia Engineering 2014 Y1 - 2014 UR - https://linkinghub.elsevier.com/retrieve/pii/S187770581402387X U6 - https://doi.org/10.1016/j.proeng.2014.11.272 IS - 87 SP - 88 EP - 91 PB - Elsevier CY - Brescia, Italy ER - TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Hirsch, Sören ED - Sánchez-Rojas, José Luis ED - Brama, Riccardo T1 - Technology towards a SAW based phononic crystal sensor T2 - Konferenz: SPIE Microtechnologies, Barcelona, Spain, 2015/ Titel: PROCEEDINGS VOLUME 9517 SPIE MICROTECHNOLOGIES | 4-6 MAY 2015 Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems Y1 - 2015 UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2178810 U6 - https://doi.org/10.1117/12.2178810 ER - TY - CHAP A1 - Oseev, Aleksandr A1 - Schmidt, Marc-Peter A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - Phononic crystal based liquid sensor governed by localized defect resonances T2 - Konferenz: IEEE Symposium (IUS) Ultrasonics, 2015/ Titel: 2015 IEEE International Ultrasonics Symposium (IUS) Y1 - 2015 UR - http://ieeexplore.ieee.org/document/7329492/ SN - 978-1-4799-8182-3 U6 - https://doi.org/10.1109/ULTSYM.2015.0053 SP - 1 EP - 4 PB - IEEE CY - Taipei, Taiwan ER - TY - CHAP A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Engel, Christian A1 - Brose, Andreas A1 - Hirsch, Sören T1 - A7.1 - Flexible free-standing SU-8 microfluidic impendance spectroscopy sensor for 3D molded interconnect devices application T2 - Konferenz: AMA Conferences 2015/ Titel: Proceedings SENSOR 2015 Y1 - 2015 UR - http://www.ama-science.org/doi/10.5162/sensor2015/A7.1 SN - 978-3-9813484-8-4 U6 - https://doi.org/10.5162/sensor2015/A7.1 SP - 151 EP - 155 PB - AMA Service GmbH CY - Nürnberg, Germany ER - TY - JOUR A1 - Konoplev, Georgii A1 - Agafonova, Darina A1 - Bakhchova, Liubov A1 - Mukhin, Nikolay A1 - Kurachkina, Marharyta A1 - Schmidt, Marc-Peter A1 - Verlov, Nikolay A1 - Sidorov, Alexander A1 - Oseev, Aleksandr A1 - Stepanova, Oksana A1 - Kozyrev, Andrey A1 - Dmitriev, Alexander A1 - Hirsch, Sören T1 - Label-Free Physical Techniques and Methodologies for Proteins Detection in Microfluidic Biosensor Structures JF - Biomedicines KW - label-free biosensor KW - microfluidics KW - proteins detection KW - optical biosensors KW - impedance spectroscopy KW - plasmon resonance KW - point-of-care KW - diagnostic devices Y1 - 2022 U6 - https://doi.org/10.3390/biomedicines10020207 SN - 2227-9059 VL - 10 IS - 2 SP - 207 PB - MDPI ER -