TY - JOUR
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Oseev, Aleksandr
A1 - Schmidt, Marc-Peter
A1 - Hirsch, Sören
T1 - SAW Based Sandwich Phononic Crystal Sensor
JF - Procedia Engineering
N2 - Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip.
Y1 - 2016
UR - https://linkinghub.elsevier.com/retrieve/pii/S1877705816335640
U6 - https://doi.org/10.1016/j.proeng.2016.11.251
SN - 18777058
IS - 168
SP - 700
EP - 703
PB - Elsevier
ER -
TY - JOUR
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Hirsch, Sören
T1 - SAW based phononic crystal sensor, technological challenges and solutions
JF - Microsystem Technologies
Y1 - 2016
UR - http://link.springer.com/10.1007/s00542-015-2781-3
U6 - https://doi.org/10.1007/s00542-015-2781-3
SN - 0946-7076, 1432-1858
SP - 1593
EP - 1599
PB - Springer Link
ER -
TY - CHAP
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Hirsch, Sören
T1 - SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach
T2 - Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS)
N2 - Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171–172:271–277, 2012; Oseev et al. in Sens Actuators B Chem 189:208–212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69–72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate.
Y1 - 2016
UR - http://ieeexplore.ieee.org/document/7728788/
SN - 978-1-4673-9897-8
U6 - https://doi.org/10.1109/ULTSYM.2016.7728788
SP - 1
EP - 4
PB - IEEE
CY - Tours, France
ER -
TY - CHAP
A1 - Fomina, Marina A.
A1 - Koshuro, Vladimir A.
A1 - Fomin, Aleksandr A.
A1 - Rodionov, Igor V.
A1 - Skaptsov, Aleksandr A.
A1 - Zakharevich, Andrey M.
A1 - Aman, Alexander
A1 - Oseev, Aleksandr
A1 - Hirsch, Sören
A1 - Majcherek, Soeren
ED - Tuchin, Valery V.
ED - Derbov, Vladimir L.
ED - Postnov, Dmitry E.
ED - Meglinski, Igor V.
ED - Larin, Kirill V.
ED - Pravdin, Alexander B.
ED - Genina, Elina A.
T1 - Peculiarities of structure formation of layered metal-oxide system Ti-Ta-(Ti,Ta) x O y during electro-spark alloying and thermally stimulated modification
T2 - Konferenz: Saratov, Russian Federation/ Titel: PROCEEDINGS VOLUME 9917 SARATOV FALL MEETING 2015 | 22-25 SEPTEMBER 2015 Saratov Fall Meeting 2015: Third International Symposium on Optics and Biophotonics and Seventh Finnish-Russian Photonics and Laser Symposium (PALS)
N2 - The study focuses on high-performance combined electro-spark alloying of titanium and titanium alloy (VT1-0, VT16) surface and porous matrix structure oxidation. The metal-oxide coatings morphology is the result of melt drop transfer, heat treatment, and oxidation. The study establishes the influence of technological regimes of alloying and oxidation on morphological heterogeneity of biocompatible layered metal-oxide system Ti-Ta-(Ti,Ta)xOy. It was found that during electro-spark alloying the concentration of tantalum on the titanium surface ranges from 0.1 to 3.2 at.%. Morphology of the deposited splats is represented by uniformly grown crystals of titanium and tantalum oxides, which increase from nano- to submicron size.
Y1 - 2016
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2229491
U6 - https://doi.org/10.1117/12.2229491
PB - SPIE. Digital Library
CY - Saratov, Russian Federation
ER -
TY - CHAP
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Hirsch, Sören
ED - Sánchez-Rojas, José Luis
ED - Brama, Riccardo
T1 - Technology towards a SAW based phononic crystal sensor
T2 - Konferenz: SPIE Microtechnologies, Barcelona, Spain, 2015/ Titel: PROCEEDINGS VOLUME 9517 SPIE MICROTECHNOLOGIES | 4-6 MAY 2015 Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Y1 - 2015
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2178810
U6 - https://doi.org/10.1117/12.2178810
ER -
TY - CHAP
A1 - Oseev, Aleksandr
A1 - Schmidt, Marc-Peter
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Hirsch, Sören
T1 - Phononic crystal based liquid sensor governed by localized defect resonances
T2 - Konferenz: IEEE Symposium (IUS) Ultrasonics, 2015/ Titel: 2015 IEEE International Ultrasonics Symposium (IUS)
Y1 - 2015
UR - http://ieeexplore.ieee.org/document/7329492/
SN - 978-1-4799-8182-3
U6 - https://doi.org/10.1109/ULTSYM.2015.0053
SP - 1
EP - 4
PB - IEEE
CY - Taipei, Taiwan
ER -
TY - CHAP
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Engel, Christian
A1 - Brose, Andreas
A1 - Hirsch, Sören
T1 - A7.1 - Flexible free-standing SU-8 microfluidic impendance spectroscopy sensor for 3D molded interconnect devices application
T2 - Konferenz: AMA Conferences 2015/ Titel: Proceedings SENSOR 2015
Y1 - 2015
UR - http://www.ama-science.org/doi/10.5162/sensor2015/A7.1
SN - 978-3-9813484-8-4
U6 - https://doi.org/10.5162/sensor2015/A7.1
SP - 151
EP - 155
PB - AMA Service GmbH
CY - Nürnberg, Germany
ER -
TY - CHAP
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Engel, C.
A1 - Brose, Andreas
A1 - Aman, Alexander
A1 - Hirsch, Sören
T1 - A Novel Design and Fabrication of Multichannel Microfluidic Impedance Spectroscopy Sensor for Intensive Electromagnetic Environment Application
T2 - Konferenz: The 28th European Conference on Solid-State Transducers (EUROSENSORS)/ Titel: Procedia Engineering 2014
Y1 - 2014
UR - https://linkinghub.elsevier.com/retrieve/pii/S187770581402387X
U6 - https://doi.org/10.1016/j.proeng.2014.11.272
IS - 87
SP - 88
EP - 91
PB - Elsevier
CY - Brescia, Italy
ER -
TY - JOUR
A1 - Konoplev, Georgii
A1 - Agafonova, Darina
A1 - Bakhchova, Liubov
A1 - Mukhin, Nikolay
A1 - Kurachkina, Marharyta
A1 - Schmidt, Marc-Peter
A1 - Verlov, Nikolay
A1 - Sidorov, Alexander
A1 - Oseev, Aleksandr
A1 - Stepanova, Oksana
A1 - Kozyrev, Andrey
A1 - Dmitriev, Alexander
A1 - Hirsch, Sören
T1 - Label-Free Physical Techniques and Methodologies for Proteins Detection in Microfluidic Biosensor Structures
JF - Biomedicines
KW - label-free biosensor
KW - microfluidics
KW - proteins detection
KW - optical biosensors
KW - impedance spectroscopy
KW - plasmon resonance
KW - point-of-care
KW - diagnostic devices
Y1 - 2022
U6 - https://doi.org/10.3390/biomedicines10020207
SN - 2227-9059
VL - 10
IS - 2
SP - 207
PB - MDPI
ER -
TY - JOUR
A1 - Mukhin, Nikolay
A1 - Konoplev, Georgii
A1 - Oseev, Aleksandr
A1 - Schmidt, Marc-Peter
A1 - Stepanova, Oksana
A1 - Kozyrev, Andrey
A1 - Dmitriev, Alexander
A1 - Hirsch, Soeren
T1 - Label-Free Protein Detection by Micro-Acoustic Biosensor Coupled with Electrical Field Sorting. Theoretical Study in Urine Models
JF - Sensors
KW - acoustic liquid sensor
KW - shear bulk acoustic resonator
KW - biosensor
KW - structured sensor interface
KW - electrical field manipulation
KW - urine proteins characterisation
Y1 - 2021
U6 - https://doi.org/10.3390/s21072555
VL - 21
IS - 7
SP - 2555
PB - MDPI
ER -
TY - JOUR
A1 - Oseev, Aleksandr
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Schmidt, Marc-Peter
A1 - Mukhin, Nikolay V.
A1 - Hirsch, Soeren
T1 - SAW-Based Phononic Crystal Microfluidic Sensor—Microscale Realization of Velocimetry Approaches for Integrated Analytical Platform Applications
JF - Sensors
KW - phononic crystal
KW - liquid sensor
KW - ultrasonic velocimetry
KW - μTAS
Y1 - 2017
U6 - https://doi.org/10.3390/s17102187
VL - 17
IS - 10
SP - 2187
ER -
TY - JOUR
A1 - Kutia, Mykhailo
A1 - Mukhin, Nikolay
A1 - Petrova, Hanna
A1 - Oseev, Aleksandr
A1 - Bakhchova, Liubov
A1 - Schmidt, Marc-Peter
A1 - Aman, Alexander
A1 - Palis, Stefan
A1 - Tarasov, Sergey
A1 - Hirsch, Soeren
T1 - Sensor for the evaluation of dielectric properties of sulfur-containing heteroatomic hydrocarbon compounds in petroleum based liquids at a microfluidic scale
JF - AIP Advances
KW - Microfluidics
KW - Chemical compounds
KW - Petroleum
KW - Dielectric spectroscopy
KW - Microfluidic devices
KW - Gasoline
KW - Dielectric properties
Y1 - 2020
U6 - https://doi.org/10.1063/1.5141482
VL - 10
IS - 2
SP - 025006
PB - American Institute of Physics
ER -
TY - JOUR
A1 - Oseev, Aleksandr
A1 - Mukhin, Nikolay
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Schmidt, Marc-Peter
A1 - Steinmann, Ulrike
A1 - Fomin, Aleksandr
A1 - Kozyrev, Andrey
A1 - Hirsch, Sören
T1 - Study of liquid resonances in solid-liquid composite periodic structures (phononic crystals) – theoretical investigations and practical application for in-line analysis of conventional petroleum products
JF - Sensors and Actuators B: Chemical
KW - Phononic crystal sensor
KW - Periodic composite structure
KW - Ultrasonic sensor
KW - Gasoline sensor
KW - Petroleum sensor
KW - In-line fuel sensor
Y1 - 2018
U6 - https://doi.org/10.1016/j.snb.2017.10.144
VL - 257
SP - 469
EP - 477
ER -
TY - JOUR
A1 - Oseev, Aleksandr
A1 - Mukhin, Nikolay V.
A1 - Lucklum, Ralf
A1 - Zubtsov, Mikhail
A1 - Schmidt, Marc-Peter
A1 - Redka, Dmitrii
A1 - Kozyrev, Andrey
A1 - Hirsch, Sören
T1 - Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions
JF - Microsystem Technologies
Y1 - 2018
U6 - https://doi.org/10.1007/s00542-017-3616-1
VL - 24
IS - 5
SP - 2389
EP - 2399
ER -
TY - JOUR
A1 - Kurachkina, Margarita
A1 - Konshina, Elena
A1 - Oseev, Aleksandr
A1 - Hirsch, Sören
T1 - Hybrid structures based on gold nanoparticles and semiconductor quantum dots for biosensor applications
JF - Nanotechnology Science and Applications
Y1 - 2018
U6 - https://doi.org/10.2147/nsa.s155045
VL - 11
SP - 15
EP - 21
ER -
TY - JOUR
A1 - Hirsch, Sören
A1 - Schmidt, Marc-Peter
A1 - Oseev, Aleksandr
A1 - Engel, Christian
A1 - Brose, Andreas
A1 - Schmidt, Bertram
T1 - Flexible free-standing SU-8 microfluidic impedancespectroscopy sensor for 3-D molded interconnectdevices application
JF - Journal of Sensors and Sensor Systems
Y1 - 2016
U6 - https://doi.org/10.5194/jsss-5-55-2016
VL - 5
IS - 1
SP - 55
EP - 61
ER -