@article{SchmidtOseevLucklumetal.2016, author = {Schmidt, Marc-Peter and Oseev, Aleksandr and Lucklum, Ralf and Zubtsov, Mikhail and Hirsch, S{\"o}ren}, title = {SAW based phononic crystal sensor, technological challenges and solutions}, series = {Microsystem Technologies}, journal = {Microsystem Technologies}, publisher = {Springer Link}, issn = {0946-7076, 1432-1858}, doi = {10.1007/s00542-015-2781-3}, pages = {1593 -- 1599}, year = {2016}, language = {en} }