@article{OseevMukhinLucklumetal.2018, author = {Oseev, Aleksandr and Mukhin, Nikolay V. and Lucklum, Ralf and Zubtsov, Mikhail and Schmidt, Marc-Peter and Redka, Dmitrii and Kozyrev, Andrey and Hirsch, S{\"o}ren}, title = {Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions}, series = {Microsystem Technologies}, volume = {24}, journal = {Microsystem Technologies}, number = {5}, doi = {10.1007/s00542-017-3616-1}, pages = {2389 -- 2399}, year = {2018}, language = {en} }