@article{OseevMukhinLucklumetal.2018, author = {Oseev, Aleksandr and Mukhin, Nikolay and Lucklum, Ralf and Zubtsov, Mikhail and Schmidt, Marc-Peter and Steinmann, Ulrike and Fomin, Aleksandr and Kozyrev, Andrey and Hirsch, S{\"o}ren}, title = {Study of liquid resonances in solid-liquid composite periodic structures (phononic crystals) - theoretical investigations and practical application for in-line analysis of conventional petroleum products}, series = {Sensors and Actuators B: Chemical}, volume = {257}, journal = {Sensors and Actuators B: Chemical}, doi = {10.1016/j.snb.2017.10.144}, pages = {469 -- 477}, year = {2018}, language = {en} } @article{OseevLucklumZubtsovetal.2017, author = {Oseev, Aleksandr and Lucklum, Ralf and Zubtsov, Mikhail and Schmidt, Marc-Peter and Mukhin, Nikolay V. and Hirsch, Soeren}, title = {SAW-Based Phononic Crystal Microfluidic Sensor—Microscale Realization of Velocimetry Approaches for Integrated Analytical Platform Applications}, series = {Sensors}, volume = {17}, journal = {Sensors}, number = {10}, doi = {10.3390/s17102187}, pages = {2187}, year = {2017}, language = {en} } @article{OseevMukhinLucklumetal.2018, author = {Oseev, Aleksandr and Mukhin, Nikolay V. and Lucklum, Ralf and Zubtsov, Mikhail and Schmidt, Marc-Peter and Redka, Dmitrii and Kozyrev, Andrey and Hirsch, S{\"o}ren}, title = {Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions}, series = {Microsystem Technologies}, volume = {24}, journal = {Microsystem Technologies}, number = {5}, doi = {10.1007/s00542-017-3616-1}, pages = {2389 -- 2399}, year = {2018}, language = {en} } @inproceedings{OseevSchmidtLucklumetal.2015, author = {Oseev, Aleksandr and Schmidt, Marc-Peter and Lucklum, Ralf and Zubtsov, Mikhail and Hirsch, S{\"o}ren}, title = {Phononic crystal based liquid sensor governed by localized defect resonances}, series = {Konferenz: IEEE Symposium (IUS) Ultrasonics, 2015/ Titel: 2015 IEEE International Ultrasonics Symposium (IUS)}, booktitle = {Konferenz: IEEE Symposium (IUS) Ultrasonics, 2015/ Titel: 2015 IEEE International Ultrasonics Symposium (IUS)}, publisher = {IEEE}, address = {Taipei, Taiwan}, isbn = {978-1-4799-8182-3}, doi = {10.1109/ULTSYM.2015.0053}, pages = {1 -- 4}, year = {2015}, language = {en} } @inproceedings{SchmidtOseevLucklumetal.2016, author = {Schmidt, Marc-Peter and Oseev, Aleksandr and Lucklum, Ralf and Zubtsov, Mikhail and Hirsch, S{\"o}ren}, title = {SAW based phononic crystal liquid sensor - Periodic microfluidic channels approach}, series = {Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS)}, booktitle = {Konferenz: 2016 IEEE International Ultrasonics Symposium (IUS)/ Titel:2016 IEEE International Ultrasonics Symposium (IUS)}, publisher = {IEEE}, address = {Tours, France}, isbn = {978-1-4673-9897-8}, doi = {10.1109/ULTSYM.2016.7728788}, pages = {1 -- 4}, year = {2016}, abstract = {Phononic crystals (PnC) with a specifically designed liquid-filled defect have been recently introduced as a novel sensor platform (Lucklum et al. in Sens Actuators B Chem 171-172:271-277, 2012). Sensors based on this principle feature a band gap covering the typical input span of the measurand as well as a narrow transmission peak within the band gap where the frequency of maximum transmission is governed by the measurand. This approach has been applied for determination of volumetric properties of liquids (Lucklum et al. in Sens Actuators B Chem 171-172:271-277, 2012; Oseev et al. in Sens Actuators B Chem 189:208-212, 2013; Lucklum and Li in Meas Sci Technol 20(12):124014, 2009) and has demonstrated attractive sensitivity. One way to improve sensitivity requires higher probing frequencies in the range of 100 MHz and above. In this range surface acoustic wave (SAW) devices are an established basis for sensors. We have performed first tests towards a PnC microsensors (Lucklum et al. in Towards a SAW based phononic crystal sensor platform. In: 2013 Joint European frequency and time forum and international frequency control symposium (EFTF/IFC), pp 69-72, 2013). The respective feature size of the PnC SAW sensor has dimensions in the range of 10 µm and below. Whereas those dimensions are state of the art for common MEMS materials, etching of holes and cavities in piezoelectric materials that have an aspect ratio diameter/depth is still challenging. In this contribution we describe an improved technological process able to realize considerably deep and uniform holes in a SAW substrate.}, language = {en} } @article{LucklumZubtsovOseevetal.2016, author = {Lucklum, Ralf and Zubtsov, Mikhail and Oseev, Aleksandr and Schmidt, Marc-Peter and Hirsch, S{\"o}ren}, title = {SAW Based Sandwich Phononic Crystal Sensor}, series = {Procedia Engineering}, journal = {Procedia Engineering}, number = {168}, publisher = {Elsevier}, issn = {18777058}, doi = {10.1016/j.proeng.2016.11.251}, pages = {700 -- 703}, year = {2016}, abstract = {Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip.}, language = {en} } @article{SchmidtOseevLucklumetal.2016, author = {Schmidt, Marc-Peter and Oseev, Aleksandr and Lucklum, Ralf and Zubtsov, Mikhail and Hirsch, S{\"o}ren}, title = {SAW based phononic crystal sensor, technological challenges and solutions}, series = {Microsystem Technologies}, journal = {Microsystem Technologies}, publisher = {Springer Link}, issn = {0946-7076, 1432-1858}, doi = {10.1007/s00542-015-2781-3}, pages = {1593 -- 1599}, year = {2016}, language = {en} }