@article{OseevMukhinLucklumetal.2020, author = {Aleksandr Oseev and Nikolay V. Mukhin and Ralf Lucklum and Mikhail Zubtsov and Marc-Peter Schmidt and Dmitrii Redka and Andrey Kozyrev and S{\"o}ren Hirsch}, title = {Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions}, journal = {Microsystem Technologies}, volume = {24}, number = {5}, pages = {2389 -- 2399}, doi = {10.1007/s00542-017-3616-1}, year = {2020}, }