TY - JOUR A1 - Oseev, Aleksandr A1 - Mukhin, Nikolay V. A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Schmidt, Marc-Peter A1 - Redka, Dmitrii A1 - Kozyrev, Andrey A1 - Hirsch, Sören T1 - Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions T2 - Microsystem Technologies Y1 - 2020 UR - https://opus4.kobv.de/opus4-fhbrb/frontdoor/index/index/docId/2590 VL - 24 IS - 5 SP - 2389 EP - 2399 ER -