@inproceedings{SchmidtOseevLucklumetal.2024, author = {Marc-Peter Schmidt and Aleksandr Oseev and Ralf Lucklum and S{\"o}ren Hirsch}, title = {Technology towards a SAW based phononic crystal sensor}, booktitle = {Konferenz: SPIE Microtechnologies, Barcelona, Spain, 2015/ Titel: PROCEEDINGS VOLUME 9517 SPIE MICROTECHNOLOGIES | 4-6 MAY 2015 Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems}, editor = {Jos{\´e} Luis S{\´a}nchez-Rojas and Riccardo Brama}, doi = {10.1117/12.2178810}, url = {http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2178810}, year = {2024}, }