TY - JOUR A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Zubtsov, Mikhail A1 - Hirsch, Sören T1 - SAW based phononic crystal sensor, technological challenges and solutions T2 - Microsystem Technologies Y1 - 2024 UR - https://opus4.kobv.de/opus4-fhbrb/frontdoor/index/index/docId/3083 UR - http://link.springer.com/10.1007/s00542-015-2781-3 SN - 0946-7076, 1432-1858 SP - 1593 EP - 1599 PB - Springer Link ER -