@article{SchmidtOseevLucklumetal.2024, author = {Marc-Peter Schmidt and Aleksandr Oseev and Ralf Lucklum and Mikhail Zubtsov and S{\"o}ren Hirsch}, title = {SAW based phononic crystal sensor, technological challenges and solutions}, journal = {Microsystem Technologies}, pages = {1593 -- 1599}, doi = {10.1007/s00542-015-2781-3}, url = {http://link.springer.com/10.1007/s00542-015-2781-3}, year = {2024}, }