TY - CONF A1 - Schmidt, Marc-Peter A1 - Oseev, Aleksandr A1 - Lucklum, Ralf A1 - Hirsch, Sören A2 - Sánchez-Rojas, José Luis A2 - Brama, Riccardo T1 - Technology towards a SAW based phononic crystal sensor T2 - Konferenz: SPIE Microtechnologies, Barcelona, Spain, 2015/ Titel: PROCEEDINGS VOLUME 9517 SPIE MICROTECHNOLOGIES | 4-6 MAY 2015 Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems Y1 - 2024 UR - https://opus4.kobv.de/opus4-fhbrb/frontdoor/index/index/docId/3091 UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2178810 ER -