TY - CONF A1 - Möllmann, Klaus-Peter A1 - Vollmer, Michael T1 - IR Imaging of Mircosystems: Special Requirements, Experiments and Applications T2 - In: Sensor + Test Conferences 2011 : Nürnberg Exhibition Centre, Germany, 7. - 9.6.2011 ; [including] SENSOR 2011, 15th International Conference on Sensors and Measurement Technology, OPTO 2011, photonic metrology, 10th International Conference on Optical Technologies for Sensing and Measurement, IRS2 2011, 12th International Conference on Infrared Sensors & Systems ; short proceedings / AMA Fachverband für Sensorik e.V. - Wunstorf/Germany : AMA Service GmbH, 2011. - ISBN 978-3-9810993-8-6 Y1 - 2014 UR - https://opus4.kobv.de/opus4-fhbrb/frontdoor/index/index/docId/660 SP - 236 ER -