@inproceedings{MoellmannLutzVollmeretal.2014, author = {Klaus-Peter M{\"o}llmann and Norbert Lutz and Michael Vollmer and Ch. Wille}, title = {Thermography of Microsystems}, booktitle = {In: InfraMation proceedings Vol. 5 (2004), 183-196}, pages = {183 -- 196}, year = {2014}, }