TY - CONF A1 - Möllmann, Klaus-Peter A1 - Lutz, Norbert A1 - Vollmer, Michael A1 - Wille, Ch. T1 - Thermography of Microsystems T2 - In: InfraMation proceedings Vol. 5 (2004), 183-196 Y1 - 2014 UR - https://opus4.kobv.de/opus4-fhbrb/frontdoor/index/index/docId/538 SP - 183 EP - 196 ER -