Investigation of proximity effects in electron microscopy and lithography

  • A fundamental challenge in lithographic and microscopic techniques employing focused electron beams are so-called proximity effects due to unintended electron emission and scattering in the sample. Herein, we apply a method that allows for visualizing electron induced surface modifications on a SiN substrate covered with a thin native oxide layer by means of iron deposits. Conventional wisdom holds that by using thin membranes proximity effects can be effectively reduced. We demonstrate that, contrary to the expectation, these can be indeed larger on a 200 nm SiN-membrane than on the respective bulk substrate due to charging effects.

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Author:Marie-Madeleine Walz, Florian Vollnhals, Florian Rietzler, Matthias Schirmer, Hans-Peter Steinrück, Hubertus Marbach
Document Type:Article
Year of Completion:2012
Publishing Institution:Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
Release Date:2012/11/07
Tag:electron beams; electron emission; membranes; proximity effect (lithography); scanning electron microscopy
Original publication:Applied Physics Letters 100.5 (2012): 06.11.2012 <>
Institutes:Naturwissenschaftliche Fakultät / Naturwissenschaftliche Fakultät -ohne weitere Spezifikation-
Dewey Decimal Classification:Naturwissenschaften und Mathematik / Chemie / Chemie und zugeordnete Wissenschaften
PACS-Classification:00.00.00 GENERAL / 07.00.00 Instruments, apparatus, and components common to several branches of physics and astronomy (see also each subdiscipline for specialized instrumentation and techniques) / 07.78.+s Electron, positron, and ion microscopes; electron diffractometers
60.00.00 CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES / 68.00.00 Surfaces and interfaces; thin films and nanosystems (structure and nonelectronic properties) (for surface and interface chemistry, see 82.65.+r, for surface magnetism, see 75.70.Rf) / 68.37.-d Microscopy of surfaces, interfaces, and thin films / 68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
open_access (DINI-Set):open_access
Collections:Universität Erlangen-Nürnberg / Allianzlizenzen / Allianzlizenzen 2012

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