@phdthesis{Rambach2007, author = {Martin Rambach}, title = {Untersuchung von Ausheilverfahren f{\"u}r Aluminium-implantierte Schichten in 4H-Siliciumcarbid}, type = {doctoralthesis}, school = {Friedrich-Alexander-Universit{\"a}t Erlangen-N{\"u}rnberg (FAU)}, year = {2007}, }