Refine
Document Type
- Doctoral thesis (1)
Has Fulltext
- yes (1)
Is part of the Bibliography
- no (1)
Year of publication
- 2005 (1)
Language
- English (1)
Keywords
- Defomation measurement (1) (remove)
Institute
This thesis comprises the development, accuracy testing and application of the so-called nanoDAC method (nano Deformation Analysis by Correlation). The method combines scanning probe microcopy (SPM) images and digital image correlation (DIC) to derive an in-situ deformation measurement technique. The results are full-field 2D displacement fields with nanometer resolution. The method can be performed on bulk materials, thin films, and on microelectronic components. A thermosetting polymer material typically applied in microelectronics systems serves as an example to emphasize the capability of the method. Crack tip opening fields of a compact tension (CT) specimen are experimentally determined by means of nanoDAC and the obtained fields act as the basis for the extraction of the stress intensity factor as a fracture mechanical property. In addition finite element analyses are carried out and an adaptation strategy between experimental and numerical results is developed.