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The authors describe and interpret curvature-related changes to the ellipsometric readout. As model system for a concave curvature, a set of three spherical microscopic indents in silicon (100) of different sizes was prepared by instrumented indentation testing using a spherical indenter. For reference, these samples were characterized by AFM to reveal the topography of each structure. The concavelike indents were analyzed by Mueller-Matrix imaging ellipsometry to extract lateral intensity images of 12 elements of the Mueller-Matrix. As a result of the detailed analysis of the image elements m22, m23, and m14, it was possible to correlate intensity changes and symmetry properties to depolarization and cross polarization induced by the edge threshold and the curved surface of the indent.
In der DIN EN ISO 14577 Metallische Werkstoffe – Instrumentierte Eindringprüfung zur Bestimmung der Härte und anderer Werkstoffparameter sind die Durchführung und Auswertung des Verfahrens, sowie die Kalibrierung der zu verwendenden Prüfmaschine genormt. In dieser Norm werden auch grundsätzliche Aussagen zur Bestimmung der Messunsicherheit gemacht.
An Beispielen aus der täglichen Prüfpraxis werden verschiedene Möglichkeiten, aber auch die Grenzen der Bestimmung der Messunsicherheitbei der Instrumentierten Eindringprüfung beschrieben und kritisch diskutiert.
Some critical discussion of the state of the art of uncertainty evaluationin Instrumented Indentation Testing IIT
Nowadays the Instrumented Indentation Testing (IIT), in the nano range often named as nano indention, is one of the most commonly used methods to determine the mechanical properties of materials in the micro and nano range. This method is already extensive standardized in ISO 14577 part 1-4. In the past, the application of this standard in testing praxis shows that the established values have an excellent precision.If an uncertainty is calculated, the range of values within which the true value is asserted to lie with some level of confidencewill be known. In part 1 of ISO 14577 [1] two methods for evaluation of the uncertainty in IIT are mentioned:
Method 1 for determining uncertainty considers only those uncertainties associated with the overall measurement performance of the testing machine with respect to the reference blocks.
Method 2calculates a combined uncertainty from individual contributions. These may be grouped into random and systematic uncertainties.
Both methods will be described in detail using examples from the dailyexperimental praxis. The comparabilityof both methods will be critically discussed. Finally, it will be showedhow the calculated uncertaintiescan be used for performancetests and product specifications.
Acknowledgement
This work was performed under the support of the EMPIR project 17NRM05Advancing measurement uncertainty̶ comprehensiveexamples for key international standards
References
[1] ISO 14577 part 1 (2017)