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Automated electron backscatter diffraction (EBSD) is generally unable to distinguish between multiple cubic phases in a specimen without additional information, such as that obtained by simultaneous energy dispersive X-ray spectroscopy (EDS). Small particles of phases with relatively similar compositions push the limits of phase identification using simultaneous EBSD and EDS, and a mismatch exists between the spatial resolutions of these two techniques due to them having different electron interaction volumes. In a recent paper, the present authors explored using backscatter detectors mounted on top of the EBSD detector to obtain atomic number (Z) contrast images that could be used for phase segmentation in cases where the results from the EBSD and EDS signals remain ambiguous. In the present work, we show that similar information can be obtained from the raw EBSD patterns themselves at higher spatial resolution than was obtained from the backscatter detectors, with the additional advantage of having no spatial mismatch between the data collection grids.
Since the BSE signal depends on many factors, like the chemistry of the phase and the acceleration voltage, the size and position of the detector array is (slightly) different from phase to phase so that an (iterative) post-processing of the stored patterns is highly recommended. The derived BSE signal can be used for phase assignment in high resolution and high speed maps when EBSD fails and/or EDS (energy dispersive spectroscopy) needs too much time for a suitable and parallel signal acquisition.