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AbstractTwo‐photon polymerization (2PP) additive manufacturing (AM) utilizes feedstocks of ceramic nanoparticles of a few nanometers in diameter, enabling the fabrication of highly accurate technical ceramic design with structural details as small as 500 nm. The performance of these materials is expected to differ from conventional AM ceramics, as nanoparticles and three‐dimensional printing at high resolution introduce new microstructural aspects. This study applies 2PP‐AM of yttria‐stabilized zirconia to investigate the mechanical response behavior under compressive load, probing the influence of smallest structural units induced by the line packing during the printing process, design of sintered microblocks, and sintering temperature and thereby microstructure. We find a dissipative mechanical response enhanced by sintering at lower temperatures than conventional. The pursued 2PP‐AM approach yields a microstructured material with an increased number of grain boundaries that proposedly play a major role in facilitating energy dissipation within the here printed ceramic material. This microplastic response is further triggered by the filigree structures induced by hollow line packing at the order of the critical defect size of ceramics. Together, these unique aspects made accessible by the 2PP‐AM approach contribute to a heterogeneous nano‐ and microstructure, and hint toward opportunities for tailoring the mechanical response in future ceramic applications.
Analyzing materials composed of multiple elements with spectroscopic techniques such as X-ray Photoelectron Spectroscopy (XPS), Auger-Electron Spectroscopy (AES) or Electron Probe Microanalysis (EPMA), can be challenging due to spectral overlap. Moreover, each analytical method introduces its own set of challenges, e.g., the strong secondary fluorescence effect for neighbor elements in EPMA, thus, making the accurate elemental quantification in such materials difficult. When the material is available as thin film, additional constraints are inherently present. To provide a reference material for these analytical challenges high entropy alloys (HEAs) are excellent candidates. Currently, there is no thin film reference available containing more than 2 elements.
Unlike traditional alloys, which typically consist of one or two main elements and smaller amounts of secondary elements, HEAs are characterized by the presence of multiple principal elements in almost equal proportions. This unique composition results in a high degree of disorder at the atomic level, leading to exceptional mechanical, physical, and often unexpected properties. HEAs have garnered significant attention in materials science and engineering due to their potential applications in a wide range of industries, from aerospace and automotive to electronics and renewable energy.
For the preparation of a dedicated thin film reference material, we have chosen to prepare HEAs by magnetron sputtering, since it is not associated with elemental segregation that may occur due to the high configurational entropy of HEAs, which promotes atomic rearrangements. Our goal was to prepare films with a homogeneous thickness and defined chemical composition to be analyzed by various methods dedicated to surface analysis.
The material, consisting of titanium, chromium, manganese, iron, and nickel was deposited as film on silicon substrates - to our knowledge the first HEA thin film of this type reported in literature. A set of different thickness of the films was chosen, on the one hand to facilitate the analysis with different techniques, and on the other side to evaluate the limitations of the respective methods. The films morphology was characterized as prepared by SEM followed by the analysis of their 2D compositional homogeneity by EDX, XRF, ToF-SIMS and XPS. in-depth chemical composition was evaluated by ToF-SIMS and AES. The outcomes of analyzing the initial batches of films will be presented.
Nanopipettes are a type of solid-state nanopore with needle-like geometry. Their applications range from imaging, sensing, diagnostics, and use as injectors. The response of nanopipette sensors is highly dependent on the size, geometry and chemical properties of the sensing region. As nanopipettes are increasingly tuned and modified for specific analytes, a better understanding of the surface chemistry and morphology of the inner channel is necessary. For exploring these effects, quartz nanopipettes were modified by gas phase silanization, a well-utilised technique in the field to enhance performance of nanopipettes, and further functionalised with a metal bis thiolate complex, to aid in chemical analysis. The inner channel of the sensing region was exposed with focused ion beam (FIB) milling as a dedicated sample preparation method for nanoscale surface analysis. The sample characterisation involved scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and low-energy energy dispersive x-ray spectroscopy (EDX). The results demonstrate the first steps towards full characterisation of nanopipettes at the nanoscale, notably with access to the inner channel. The methods used here can be applied to gain further understanding of the response of these sensors to complex analytes, and allow for the study of different surface functionalisation at the all-important sensing region.
Nanopipettes are a type of solid-state nanopore with needle-like geometry. Their applications range from imaging, sensing, diagnostics, and use as injectors. The response of nanopipette sensors is highly dependent on the size, geometry and chemical properties of the sensing region. As they are increasingly tuned and modified for specific analytes, a better understanding of the surface chemistry and morphology of the inner channel is necessary. With the aim of developing a comprehensive approach for characterisation of such nanopipettes, this research focuses on combining surface-sensitive analysis methods with advanced sample preparation techniques. Quartz substrates were modified by gas phase silanization, a well-utilised technique in the field to enhance performance of nanopipettes, and further functionalised with a metal bis thiolate complex, to aid in chemical analysis. The sample characterisation involved scanning electron microscopy (SEM), low-energy dispersive x-ray spectroscopy (EDX), time-of-flight secondary ion mass spectrometry (ToF-SIMS) and Auger electron spectroscopy (AES). Using focused ion beam (FIB) milling under gentle conditions, the inner surface of quartz nanopipettes was exposed whilst preserving the integrity of the overall structure (see figure). Owing to the challenging analysis conditions, modification and analysis of flat quartz substrates has been performed in parallel for optimisation purposes. The results demonstrate the first steps towards full characterisation of nanopipettes at the nanoscale, notably with access to the inner channel. The methods used here can be applied to gain further understanding of the response of these sensors to complex analytes and allow for the study of different surface functionalisations at the all-important sensing region.
Graphene has been commercialized for over a decade. It is usually used in the form of suspensions or inks. In this study, we analyze the starting material for commercial functionalized graphene (FG) solutions and inks as well as their starting material (FG powders) using X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), energy-dispersive X-Ray spectroscopy (EDX), time of flight secondary ion mass spectrometry (ToF-SIMS) and Auger electron spectroscopy (AES). Graphene was functionalized with fluorine, oxygen, ammonia, and carboxylic acid.
Our results suggest a significant effect of water and commercial resins on the presence as well as the morphological behavior of graphene and associated functionalized group. For example, XPS analysis shows some significant differences between the solutions and the starting materials (powders). These changes can be explained by the location of the functionalization at the outer most surface as indicated by Chemello et al.
Graphene has been commercialized for over a decade. It is usually used in the form of suspensions or inks. In this study, we analyze the starting material for commercial functionalized graphene (FG) solutions and inks as well as their starting material (FG powders) using X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), energy-dispersive X-Ray spectroscopy (EDX), time of flight secondary ion mass spectrometry (ToF-SIMS) and Auger electron spectroscopy (AES). Graphene was functionalized with fluorine, oxygen, ammonia, and carboxylic acid.
Our results suggest a significant effect of water and commercial resins on the presence as well as the morphological behavior of graphene and associated functionalized group. For example, XPS analysis shows some significant differences between the solutions and the starting materials (powders). These changes can be explained by the location of the functionalization at the outer most surface as indicated by Chemello et al.
Graphene and graphene-oxide (GO) are advanced materials which – similar to other graphene-related 2D materials (GR-2M) - are already used for instance in catalysis processes, biomedical applications, in inks and resins, or as composite materials for the aviation industry. The lateral/structural characterization of graphene oxide (GO) flakes is a challenging task, with steps like sample preparation, representative image selection and exact determination of the particle size distribution of well-defined size and shape descriptors being crucial for an accurate analysis. To ensure that safe-by-design principles are met within the various application fields, the commercial material must be thoroughly characterized and specified through well-known and standardized procedures.
GO flakes with different degrees of complexity were selected to assess the requirements for an accurate evaluation of their physico-chemical properties. These samples show inherent features with complex nanoscale characteristics such as porosity and edge roughness; further, the lateral size (quantified via equivalent circular diameter (ECD), minimum Feret and maximum Feret) of isolated and overlapping particles deposited on a substrate span over several orders of magnitude (nano to micron scale). The samples showed different degrees of agglomeration (and possible aggregation) with sizes ranging between submicron to a few tens of micrometers.
One focus is the automated segmentation and evaluation of images obtained by electron microscopy. The GO samples appear translucent with well-defined contrast between single and overlapping flakes both with the secondary electron detector of type InLens as well as with SEM in the transmission mode (STEM) utilizing a dedicated sample holder. To this end it is of utmost importance for the accurate image segmentation to carefully select thresholds both manually and through semi-automatic approaches using well-known threshold algorithms such as “IsoData” and pre-defined segmentation applications such as the ParticleSizer software package.
Further specific challenges in identifying and extracting key features of selected graphene oxide flakes are being discussed and approaches towards accurate and representative characterization are presented.
AbstractLithium‐ion batteries, essential for electronics and electric vehicles, predominantly use cathodes made from critical materials like cobalt. Sulfur‐based cathodes, offering a high theoretical capacity of 1675 mAh g−1 and environmental advantages due to sulfur's abundance and lower toxicity, present a more sustainable alternative. However, state‐of‐the‐art sulfur‐based electrodes do not reach the theoretical capacities, mainly because conventional electrode production relies on mixing of components into weakly coordinated slurries. Consequently, sulfur‘s mobility leads to battery degradation—an effect known as the “sulfur‐shuttle”. This study introduces a solution by developing a microporous, covalently‐bonded, imine‐based polymer network grown in situ around sulfur particles on the current collector. The polymer network (i) enables selective transport of electrolyte and Li‐ions through pores of defined size, and (ii) acts as a robust host to retain the active component of the electrode (sulfur species). The resulting cathode has superior rate performance from 0.1 C (1360 mAh g−1) to 3 C (807 mAh g−1). Demonstrating a high‐performance, sustainable sulfur cathode produced via a simple one‐pot process, our research underlines the potential of microporous polymers in addressing sulfur diffusion issues, paving the way for sulfur electrodes as viable alternatives to traditional metal‐based cathodes.
Covalent organic frameworks (COFs) containing well-defined redox-active groups have become competitive materials for next-generation batteries. Although high potentials and rate performance can be expected, only a few examples of p-type COFs have been reported for charge storage to date with even fewer examples on the use of COFs in multivalent ion batteries. Herein, we report the synthesis of a p-type highly porous and crystalline azatruxene-based COF and its application as a positive electrode material in Li- and Mg-based batteries. When this material is used in Li-based half cells as a COF/carbon nanotube (CNT) electrode, a discharge potential of 3.9 V is obtained with discharge capacities of up to 70 mAh g−1 at a 2 C rate. In Mg batteries using a tetrakis(hexafluoroisopropyloxy)borate electrolyte, cycling proceeds with an averge discharge voltage of 2.9 V. Even at a fast current rate of 5 C, the capacity retention amounts to 84% over 1000 cycles.
High‐Entropy Alloys and Their Affinity with Hydrogen: From Cantor to Platinum Group Elements Alloys
(2024)
AbstractProperties of high‐entropy alloys are currently in the spotlight due to their promising applications. One of the least investigated aspects is the affinity of these alloys to hydrogen, its diffusion, and reactions. In this study, high pressure is applied at ambient temperature and stress‐induced diffusion of hydrogen is investigated into the structure of high‐entropy alloys (HEA) including the famous Cantor alloy as well as less known, but nevertheless important platinum group (PGM) alloys. By applying X‐ray diffraction to samples loaded into diamond anvil cells, a comparative investigation of transition element incorporating HEA alloys in Ne and H2 pressure‐transmitting media is performed at ambient temperature. Even under stresses far exceeding conventional industrial processes, both Cantor and PGM alloys show exceptional resistance to hydride formation, on par with widely used industrial grade Cu–Be alloys. The observations inspire optimism for practical HEA applications in hydrogen‐relevant industry and technology (e.g., coatings, etc), particularly those related to transport and storage.
Revolutionizing our polymer industry for adaption to a sustainable carbon circular economy has become one of today’s most demanding challenges. Exploiting renewable resources to replace fossil-fuel—based plastics with biopolymers such as poly(lactic acid) (PLA) is inevitable while using waste streams as a raw material resource at least is promising. When it comes to using PLA as technical polymer, its high flammability must be addressed by flame retardants compatible with the thermoplastic processing of PLA and its compostability. This study proposes microalgae enriched with phosphorus from wastewater (P-Algae) as an elegant way towards a kind of sustainable organophosphorus flame retardant. The concept is demonstrated by investigating the processing, pyrolysis, flammability, and fire behavior of PLA/P-Algae, while varying the P-Algae content and comparing P-Algae with four alternative bio-fillers (phosphorylated lignin, biochar, thermally treated sewage sludge, and metal phytate) with different P-contents as meaningful benchmarks.
A damaging action of HNO3-55% only occurs in combination with its decomposition into nitrous gases, which can be caused by UV radiation. In a laboratory test, transparent HDPE jerrycans have been exposed to both UV radiation and 55 wt-% nitric acid solution at (41 ± 2)°C, for up to 20 days. For comparison, UV radiant exposure (21 days) and nitric acid exposure (up to 6 weeks) were performed separately, at nearly equal temperatures. The respective damages are compared with FTIR spectroscopy in ATR and HT-gel permeation chromatography (GPC) on a molecular level and with hydraulic internal pressure testing as a component test. For the used jerrycans, relevant oxidation can only be found after the combined exposure. The gradual increase in oxidative damage shows the good reproducibility of the lab exposure. The decomposition of nitric acid into nitrous gases by UV radiation – as well as the jerrycan oxidation – is also observed at lower HNO3 concentration (28 wt- %). Similar results are obtained after outdoor tests. Again, the damage occurs only after combined exposure, in contrast to the exposures to UV only and to HNO3 only, which were conducted in parallel. Outdoor exposures are most readily accepted as they represent possible end-use conditions. However, the reproducibility of these exposures is poor due to the large temporal variations in weather. There are also several safety risks, which is why the number of replicates remains limited. Since the outdoor and lab exposure tests show the same qualitative results, it is appropriate to conduct systematic studies in the laboratory. After 6 days of lab exposure, the oxidation damage is rated as critical, which corresponds to about 1/10 year in Central Europe, according to the UV radiant exposure. It should be noted that this amount can also occur in two sunny weeks.
Polymers of intrinsic microporosity exhibit a combination of high gas permeability and reasonable permselectivity, which makes them attractive candidates for gas separation membrane materials. The diffusional selective gas transport properties are connected to the molecular mobility of these polymers in the condensed state. Incoherent quasielastic neutron scattering was carried out on two polymers of intrinsic microporosity, PIM-EA-TB(CH3) and its demethylated counterpart PIM-EA-TB(H2), which have high Brunauer–Emmett–Teller surface area values of 1030 m2 g-1 and 836 m2 g-1, respectively. As these two polymers only differ in the presence of two methyl groups at the ethanoanthracene unit, the effect of methyl group rotation can be investigated solely. To cover a broad dynamic range, neutron time-of-flight was combined with neutron backscattering. The demethylated PIM-EA-TB(H2) exhibits a relaxation process with a weak intensity at short times. As the backbone is rigid and stiff this process was assigned to bendand-flex fluctuations. This process was also observed for the PIM-EA-TB(CH3). A further relaxation process is found for PIM-EA-TB(CH3), which is the methyl group rotation. It was analyzed by a jump-diffusion in a three-fold potential considering also the fact that only a fraction of the present hydrogens in PIM-EATB(CH3) participate in the methyl group rotation. This analysis can quantitatively describe the q dependence of the elastic incoherent structure factor. Furthermore, a relaxation time for the methyl group rotation can be extracted. A high activation energy of 35 kJ mol-1 was deduced. This high activation energy evidences a strong hindrance of the methyl group rotation in the bridged PIM-EA-TB(CH3) structure.
Multicomponent reactions (MCRs) offer a platform to create different chemical structures and linkages for highly stable covalent organic frameworks (COFs). As an illustrative example, the multicomponent Povarov reaction generates 2,4-phenylquinoline from aldehydes and amines in the presence of electron-rich alkenes. In this study, we introduce a new domino reaction to generate unprecedented 2,3-phenylquinoline COFs in the presence of epoxystyrene. This work thus presents, for the first time, structural isomeric COFs produced by multicomponent domino and Povarov reactions. Furthermore, 2,3-phenylquinolines can undergo a Scholl reaction to form extended aromatic linkages. With this approach, we synthesize two thermally and chemically stable MCR-COFs and two heteropolyaromatic COFs using both domino and in situ domino and Scholl reactions. The structure and properties of these COFs are compared with the corresponding 2,4-phenylquinoline-linked COF and imine-COF, and their activity toward benzene and cyclohexane sorption and separation is investigated. The position of the pendant phenyl groups within the COF pore plays a crucial role in facilitating the industrially important sorption and separation of benzene over cyclohexane. This study opens a new avenue to construct heteropolyaromatic COFs via MCR reactions.
In materials science, traditional techniques for analyzing layered structures are essential for obtaining information about local structure, electronic properties and chemical states. While valuable, these methods often require high vacuum environments and have limited depth profiling capabilities. The grazing exit x-ray absorption near-edge structure (GE-XANES) technique addresses these limitations by providing depth-resolved insight at ambient conditions, facilitating in situ material analysis without special sample preparation. However, GE-XANES is limited by long data acquisition times, which hinders its practicality for various applications. To overcome this, we have incorporated Bayesian optimization (BO) into the GE-XANES data acquisition process. This innovative approach potentially reduces measurement time by a factor of 50. We have used a standard GE-XANES experiment, which serve as reference, to validate the effectiveness and accuracy of the BO-informed experimental setup. Our results show that this optimized approach maintains data quality while significantly improving efficiency, making GE-XANES more accessible to a wider range of materials science applications.
Material Acceleration Platforms (MAPs) represent a transformative approach to the development of resilient and sustainable technology value chains. These platforms can identify candidate chemistries and structures via simulations, and database searches and leverage machine learning-based rapid screening to accelerate the discovery and deployment of novel materials, thereby addressing critical challenges in modern technology sectors.
Incorporating high-fidelity advanced characterization in the early phases of material development is crucial for early de-risking. Advanced characterization techniques, such as X-ray diffraction, advanced electrochemical and spectroscopic techniques provide comprehensive insights into the structural, chemical, and physical properties of materials. Long-term testing further contributes to the de-risking process by evaluating the durability and stability of materials under various environmental and operational conditions. Early identification of potential degradation mechanisms enables the refinement of material compositions and processing methods, ultimately leading to the development of more resilient materials.
Early upscaling attempts are integral to assessing the feasibility of material leads generated through machine learning-based rapid screening to evaluate the scalability of synthesis and processing techniques. This step is critical for identifying potential challenges in manufacturing, such as issues related to reproducibility, yield, and cost-effectiveness. Process design has to be a major part of the MAP-based material design to cope with the increasing share of secondary raw materials in supply chains.
This presentation will briefly summarize possible strategies to address these issues and provide deep-dives on best practices. As the demand for advanced materials continues to grow, MAPs will play an increasingly vital role in driving technological advancements and addressing global challenges.
Surface-modification platforms that are universally applicable are vital for the development of new materials, surfaces, and nanoparticles. Mussel-inspired materials (MIMs) are widely used in various fields because of their strong adhesive properties and post-functionalization reactivity. However, conventional MIM coating techniques have limited deposition selectivity and lack structural control, which has limited their use in microdevices that require full control over deposition. To overcome these limitations, we developed a micropatterning technique for MIMs using multiphoton lithography, which does not require photomasks, stamps, or multistep procedures. This method enables the creation of MIM patterns with micrometer resolution and full design freedom and paves the way for innovative applications of MIMs in various multifunctional systems and microdevices, such as microsensors, MEMS, and microfluidics.
Compound semiconductors (CS) are promising materials for the development of high-power electrical applications. They have low losses, can withstand high temperatures and can operate at very high voltages and currents. This makes them a key technology for the electrification of many high energy applications, especially electromobility and HVDC power lines.
The challenge with CS technology is that most of the process technology has to be developed anew to the high standards required by electronic applications. Today, compound semiconductors can be produced in thin layers on top of substrates fabricated from classical crystal growth processes that are already well established. A promising method for this is metal organic vapour phase epitaxy (MOVPE). With this method, many different compounds with semiconducting properties can be synthesized. Additionally, this process technology is a direct thin layer deposition method. Therefore, complex multilayer systems can be generated directly by the deposition process and without the need of doping after growing.
There are a number of critical defects that can originate from the deposition process of these thin film devices. Within this project, we intend to develop new correlative imaging and analysis techniques to determine defect types, to quantify defect size and number density, as well as to characterise defects for process optimisation.
We report here on the use of spectroscopic ellipsometry and imaging ellipsometry to investigate defects in several different compound semiconductor materials used in high-power electronic devices. The materials we investigated are β-Ga2O3, SiC, GaN, AlN, and AlGaN materials as well as oxidised SiC surfaces. All of these materials have their typical defects and require optimised measurement and analysis schemes for reliable detection and analysis. Spectroscopic ellipsometry is a highly sensitive method for determining the thicknesses and dielectric function of thin layers, yielding potentially a high number of microscopic properties. The combined method between ellipsometry and optical microscopy is called imaging ellipsometry and is especially powerful for the large amount of data it produces. We have analysed defects in SiC- and AlN-based thin film semiconductors as well as characterised the properties of different types of SiO2 layers created on top of SiC monocrystals. We developed ellipsometric models for the data analysis of the different semiconductor materials.
If the defects have geometric features, it is useful to combine the ellipsometric analysis with topometry method like interference microscopy and scanning probe microscopy. We have successfully characterised function-critical defects in MOVPE SiC layers and correlated the findings with topography from WLIM measurements. We have developed an imaging ellipsometric measurement methodology that allows to estimate the relative defect area on a surface by a statistical raw data analysis.
Compound semiconductors (CS) are promising materials for the development of high-power electrical applications. They have low losses, can withstand high temperatures and can operate at very high voltages and currents. This makes them a key technology for the electrification of many high energy applications, especially electromobility and HVDC power lines.
The challenge is that most of the process technology has to be developed specifically and tailored to the high standards required by electronic applications. Today, many different CS materials can be produced in thin layers on top of substrates fabricated from classical crystal growth processes that are already well established. A promising method for this is metal organic vapour phase epitaxy (MOVPE). This technology is a direct thin layer deposition method capable of producing complex multilayer systems directly from one deposition process without the need of doping after growing.
There are a number of critical defects that can originate from the deposition process when targeting electronic thin film devices. Within this project, we intend to develop new correlative imaging and analysis techniques to determine defect types, to quantify defect size and density, as well as to characterise defects for further process optimisation.
We report here on the use of spectroscopic and multispectral imaging ellipsometry to investigate defects in several different compound semiconductor materials used in high-power electronic devices. The materials we investigated are β-Ga2O3, SiC, GaN, AlN, and AlGaN as well as oxidised SiC. All of these materials have their typical defects and require optimised measurement and analysis schemes for reliable detection and analysis. Spectroscopic ellipsometry is a highly sensitive method for determining the thicknesses and dielectric function of thin layers, yielding potentially a high number of microscopic properties. The combined method between ellipsometry and optical microscopy is known as imaging ellipsometry and is especially powerful for the large amount of data it produces. We have analysed defects in SiC- and AlN-based thin film semiconductors as well as characterised the properties of different types of SiO2 layers created on top of SiC monocrystals. We developed ellipsometric models for the data analysis of the different semiconductor materials.
If the defects have geometric features, it is useful to combine the ellipsometric analysis with topometry methods like interference microscopy and scanning probe microscopy. We have successfully characterised function-critical defects in MOVPE SiC layers and correlated the findings with topography from WLIM measurements. We have developed an imaging ellipsometric measurement methodology that allows to estimate the relative defect area on a surface by a statistical raw data analysis.
Ellipsometry as optical metrology method for analysis of reference materials for nanoelectronics
(2024)
Electrical properties of materials at the nanoscale can be characterized using scanning microwave microscopes (SMM) and conductive atomic force microscopes (C AFM). However, the measurement results are difficult to compare since different setups and different reference standards are used. The development of new “out-of-lab” reference standards can contribute to the traceability and reliability of these scanning probe microscopy methods (SPM) and facilitate their broader industrial application.
In this study, we discuss the capability of optical methods such as ellipsometry for the characterization of existing and the development of new reference calibration samples for scanning microwave microscopy. Ellipsometry is a fast and non-destructive method, which enables very accurate determination of the layer thickness and the dielectric functions of the materials. Imaging ellipsometry is suitable for spatially resolved measurements when analyzing thin layers in microstructured samples.
We show how the electrical resistivity of indium tin oxide (ITO) layers in newly designed resistive calibration samples can be obtained from spectroscopic ellipsometric measurements. The extension of the measurement range into the mid-infrared region was necessary when analyzing ITO layers with low conductivity. This parameter was obtained by fitting a Drude function describing the absorption of the free carriers. The impact of the coating process conditions on the layer properties is discussed.
Imaging ellipsometry was applied for the characterisation of thin ITO and SiO2 layers in microstructured resistive and capacitance calibration kits. The uncertainties of determined layer thicknesses were specified according to standardized practice guides used in ellipsometry. We show how statistical fingerprint analysis of the measured ellipsometric transfer quantities can be used to validate the quality of potential reference materials for nano-electronics and to monitor the processing of structured samples.