Wissenschaftliche Artikel der BAM
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Organisationseinheit der BAM
A European EMPIR project, which aims to use large-scale piezoresistive microprobes for contact resonance applications, a well-established measurement mode of atomic force microscopes (AFMs), is being funded. As the probes used in this project are much larger in size than typical AFM probes some of the simplifications and assumptions made for AFM probes are not applicable. This study presents a guide on how to systematically create a model that replicates the dynamic behavior of microprobes, including air damping, nonlinear sensitivities, and frequency dependencies. The model is then verified by analyzing a series of measurements.