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Scanning Electron Microscopy (SEM) represents the mostly widespread method available in analytical laboratories dedicated to the characterization of physical properties such as morphology of various solid materials from ‘micro-’ down to the nanometre scale. The use of secondary electrons excited by a sharply, nm-focussed primary electron beam enables at any modern SEM to image objects with high in-depth and lateral sensitivity, i.e. with high spatial resolution. Hence, e. g. nanoparticles (NPs) are able to be easily characterized with respect to their individual size and shape, but also to the morphology of their surface.
By preparing the nano-objects on thin membranes as electron transparent samples it is possible to perform electron microscopy in the transmission mode (TEM and TSEM). The corresponding transmission (i.e. mass-thickness) contrast reveals in-depth information, but is also well suited for dimensional measurements in the 2D projection image. Both the surface sensitive mode and the transmission one are meanwhile available at any modern SEM. If an X-ray spectrometer is attached to an electron microscope, it is possible to analyse the characteristic X-rays induced by electron bombardment. Most electron microscopes have attached an energy dispersive X-ray spectrometer (EDX) so that EDX elemental maps can be carried out. Recent technological developments of high throughput EDS detectors and their advantages regarding high-resolution X-ray analysis down to the nm range are reviewed.
High-resolution micrographs (SEM, TSEM, TEM) and corresponding X-ray elemental maps on various representative nanoparticles, but also layered samples prepared in cross-section, will be presented and discussed. The importance of selecting the best suited analysis conditions will be highlighted. Also other, often challenging, topics such as sample preparation and image data processing will be critically addressed by practical examples. Further analytical techniques able to be employed at an electron microscope, like cathodoluminescence (CL) or micro-X-ray fluorescence (µXRF) will be briefly surveyed.
The TiO2 material selected for the present inter-laboratory comparison (ILC) was the bipyramidal anatase UT001 batch synthesized hydrothermally by University of Turin in the frame of the EU/FP7 Project SETNanoMetro and carefully prepared on TEM grids by BAM to be distributed to the ILC participants. A clear measurement protocol including data analysis and reporting (including an xls reporting template) has been also prepared by BAM. 14 of 18 participants have measured and reported results which have been already checked by BAM as being conform to the agreed protocol. After receiving the last results (of 4 participants) the ILC data evaluation will be carried out by BAM in line with agreed ISO/TC229 procedures as for the other case sudies.
A proposal of an inter-laboratory study (ILC) on determination of size and shape distribution of TiO2 nanoparticles (NPs) by transmission electron microscopy is presented. The anatase NPs synthesized in a controllable fashion within the EU/FP7 project SETNanoMetro can be considered as shape-defined (bipyramidal) and are offered to complete the list of case studies already in progress within ISO/TC229/JWG2. The main points of the measurement procedure are presented as well as a proposed procedure to evaluate the size and shape according to the standard operation procedure already developed within SETNanoMetro is discussed. Potential ILC participants and a plan with next step to be carried out are proposed.