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For the vast majority of ellipsometric measurements, the application of planar substrates is mandatory and requires a proper sample alignment prior to the measurement. Here, the authors present a generalized approach of how to extract the isotropic ellipsometric sample parameters from an imaging Mueller-matrix measurement even if the sample is significantly misaligned. They validate the method by layer-thickness calculations based on imaging Mueller-matrix measurements of flat crystalline silicon samples that were misaligned on purpose. Furthermore, they also exploit this method’s capabilities to perform spatially resolved layer-thickness measurements of a single-layer indium-tin-oxide coating on a fused-silica microlens without the need of realignment or repositioning of the sample during the measurement.
Within the Working Group on Inorganic Analysis (IAWG) of the Consultative Committee for Amount of Substance: Metrology in Chemistry and Biology (CCQM) international key comparisons and pilot studies related to inorganic analysis are carried to ensure consistency in this field at the highest level. Some of these comparisons deal directly with the preparation and characterization of monoelemental solutions or with topics, closely related. The importance of monoelemental solutions lies in the fact that almost every measurement in inorganic analysis relies on the comparison with either a reference material, or references in form of solutions, usually (mono)elemental solutions. All quantitative measurement approaches, e.g. isotope dilution or standard addition, need an accurate reference solution made from a well characterized reference material, prepared under full gravimetric control. These primary (monoelemental) solutions do not only serve as arbitrary references/calibration solutions, but they also link up measurement results to the International System of units (SI), this way establishing the so-called metrological traceability to a measurement unit of the SI. Without such solutions on the highest possible level of accuracy and with the smallest possible associated uncertainties (for e.g. element content and/or impurities), an analysis itself can never be as good as it could be with appropriate reference solutions. This article highlights select key comparisons and pilot studies dealing with monoelemental solution related topics within the IAWG from the foundation of CCQM – 25 years ago – up to latest achievements in the field of inorganic analysis.
The SAWG was established as an ad-hoc working group in 2003 before being established as a permanent working group. The first comparison was in 2007. Dr Unger recalled the terms of reference for the group, which paralleled those of the CCQM itself, with a focus on spatially resolved chemical surface analysis at the micro- and nano-scale. The group also had a remit to act as a forum for exchange of information on research and development of surface analysis, establish contact with relevant stakeholders and promote the development of SI traceable chemical surface measurements. The group currently had participants from 18 institutes, although five had not sent participants to recent meetings.
Reporting progress on studies, Dr Unger said that P-190CCQM-K-157 (measurement of HfO2 in thin film) had been completed, and the subsequent K-157 approved is ongoing and that for CCQM-K153 (Measurement of Specific Adsorption of N2 and Kr on nonporous SiO2 at liquid nitrogen temperature by BET) was at the draft B was completed stageand distributed to CCQM WG chairpersons for approval.
Dr Unger reported that CCQM-K-153 had covered measurement of specific absorption of nitrogen or krypton on nonporous silica at liquid nitrogen [ambient] temperature. This included an application of the BET method, a standard method for determination of surface area. This fitted into the ‘nonporous’ region of the SAWG measurement space, which included microporous, mesoporous and microporous regions. Of these regions, CCQM-K136 and CCQM-K153 demonstrated capability in meso- and microporous media respectively. CCQM-K153 involved two measurands; amount of absorbed gas at liquid nitrogen temperature, expressed as specific absorption, and the BET surface area. Specific absorption could in principle be traceable to the SI; BET was operationally defined. Five institutes participated. A detailed uncertainty budget was available for both measurands. Results had been excellent, with all laboratories agreeing well within their uncertainties and all in agreement with the reference value.
Reporting on CCQM P190, Dr Unger described the study objective measurand (amount of substance of HfO2 in a thin film), samples and methods. After showing transmission electron microscope images obtained in the study, he briefly reviewed the conclusions. The study identified a need to handle carbon contamination, harmonise the XPS measurement protocol, determine emission angle and identify a consensus value for attenuation length. These conclusions had informed the design of the proposed ongoing K157 study approved at the 24th Meeting of te CCQM.
The group planned a number of comparisons for the next three years:
2019: A pilot study on the amount of substance in a thin organic layer (previously approved).
2020: CCQMK-157, Measurement of the amount of substance of HfO2; A Key comparison on specific gas adsorption on microporous samples and a Pilot study on Homogeneous surface composition of an ionic liquid.
2021: A key comparison measuring the amount of substance in a thin organic layer.
Dr Unger additionally described a recently proposed pilot study to examine chemical composition in a deep nanoscale layer. This was important for the electronics industry. Four participants had expressed interest. The measurand will be the amount of Ir(ppy)2(acac) in a thin organic layer within an organic layer stack on a silicon substrate. He also reported that SAWG had started work on characterisation of graphene material grown by chemical vapour decomposition (CVD). The work would examine coverage on the substrate, number of layers, level of disorder, uncertainty budgets associated with the measurement, and data analysis. A link to VAMAS Technical Work Area 41 “Graphene and Related 2D Materials“ would also be established.
Looking forward, Dr Unger said the group had established a task group on application of Raman spectroscopy. This had important applications but was currently seen as qualitative. He presented the terms of reference for the task group for approval by the CCQM.
Dr Unger reviewed the SAWG activities that have progressed the state of the art in measurement science. He listed the past and ongoing comparisons that had addressed new and challenging measurement problems, and drew attention to a number of key publications in surface analysis. He additionally described stakeholder engagement activities, including collaboration with VAMAS, input to ISO TC 201, contributions to Euramet projects, and contributions to two recent stakeholder workshops.
ICP-MS has played a key role in inorganic chemical metrology for 25 years, from the 1993 CIPM feasibility study which led to establishment of the CCQM. Since that time, the Inorganic Analysis Working Group of the CCQM has organised 56 international comparisons involving measurements by ICP-MS and, in a recent comparison, 16 different national institutes submitted their results using the technique. Metrological applications of ICP-MS currently address an enormous range of measurements using a wide variety of instrumentation, calibration strategies and methodologies. This review provides an overview of the ICP-MS field with an emphasis on developments which are of particular relevance to chemical metrology.
Examples from CCQM comparisons and the services available from the participants are used to illustrate how the capability and scope of ICP-MS methods have expanded far beyond the expectations of 1993. This is due in part to the research and development Programmes of the national institutes which participate in the CCQM. They have played a key role in advancing new instrumentation and applications for elemental analysis, isotope dilution mass spectrometry, determination of isotopic ratio or composition, and speciation of organometallic compounds. These developments are continuing today, as demonstrated by work in new fields such as heteroatom quantitation of proteins, characterisation and counting of nanoparticles using spICP-MS, and LA-ICP-MS analysis of solid materials.