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Der Vortrag widmet sich der „Zentrifugentechnologie zur statistischen Untersuchung von Stumpfklebungen“ und beschreibt drei wesentlich verschiedene Realsysteme (Fügefläche 1/Klebstoff/ Fügefläche 2), um die Statistik ZPM (wiederholte Ein-Proben-Prüfung) vs. CAT (Mehr-Proben-Prüfung) zu vergleichen. Dazu wurden drei unterschiedliche Klebstoff-klassen mit typischen Fügeteilmaterialkombinationen ausgewählt und in einem Vorversuch mit jeweils 3 unterschiedlichen Prüfgeschwindigkeiten sowohl im Weg-geregelten als auch Kraft-geregelten Mode beansprucht. Die Ergebnisse ZPM vs. CAT und Kraft- vs. Weg-Regelung des Vorversuches zeigten keinerlei Unterschiede auf. Im Ergebnis wurde ein Ringversuch im Kraft-geregelten Mode (6xZPM vs. 8xCAT) für ein Referenzsystem durchgeführt, der nachwies, dass die CAT-Technologie statistisch relevante Prüfergebnisse zur Klebfestigkeit bereitstellt. Es zeigte sich, dass für zwei ZPM-Teilnehmer im Vertrauensbereich 99% statistisch signifikant etwas kleinere Werte der Klebfestigkeit bestimmt wurden, was auf geringfügige Abweichungen von der axialen Ausrichtung des eingespannten Prüflings bei der Ein-Proben-ZPM-Zugprüfung zurückgeführt wird.
Das Fügeverfahren Kleben bietet viele Vorteile, wie z.B. das Verbinden unterschiedlicher Materialklassen, geringe thermische Belastung (und damit ggf. verbundene Strukturveränderung/-schwächung) der Fügeteile und eine Lastverteilung über den gesamten Fügebereich. Die Auswahl an verfügbaren Klebstoffen und Vorbehandlungsoptionen sind dabei - wie die Applikationen auch - vielfältig. Es werden vier Applikationsbeispiele zu Referenzklebverbunden aus Edelstahl, zur Plasmaaktivierung von Niedrigenergie-Polymeren, zur Bestimmung der Haftfestigkeit von Lackierungen auf GFK und zur Wirkung von Primern vorgestellt. Einige Polymere weisen z.B. Eigenschaften auf, die eine Herstellung von festen und dauerhaft beanspruchbaren Kleb-verbindungen erschweren. Im Allgemeinen geht dies mit geringen Oberflächenenergien einher. Mittels Oberflächenvorbehandlung, z.B. durch Plasmafeinreinigung bzw. Plasmaaktivierung, können die Grenzflächen solcher Polymere - bezogen auf die Eignung als Fügeteile (Klebfestigkeit) oder als Substrat (Haftfestigkeit) – optimiert bzw. die Oberflächenenergie erhöht werden. Schnelle, zuverlässige und statistisch abgesicherte Prüfverfahren zur Ermittlung von Verbund-eigenschaften sind dabei unverzichtbar.
Das Fügeverfahren Kleben bietet viele Vorteile wie z.B. das Verbinden schwieriger Materialklassen, geringe thermische Belastung (Strukturveränderung/-schwächung) der Fügepartner und eine Lastverteilung über den gesamten Fügebereich. Die Auswahl an verfügbaren Klebstoffen und Vorbehandlungsoptionen ist dabei ebenfalls vielfältig. Einige Polymere weisen darüber hinaus Eigenschaften auf, die eine Herstellung von festen und dauerhaft beanspruchbaren Klebverbindungen erschweren. Mittels Oberflächenbehandlung, z.B. durch Plasmafeinreinigung bzw. –aktivierung, können die Grenzflächern solcher Polymere - bezogen auf die Eignung als Fügeteilpartner – optimiert werden. Schnelle Prüfverfahren zur Ermittlung von Verbundeigenschaften sind somit erforderlich.
Das Messprinzip Centrifugal Adhesion Testing Technologie verwendet die radial gerichtete Zentrifugalkraft als Belastungsgröße des zu testenden Verbunds, die durch Variation der Drehzahl gesteuert wird. Bei Erreichen der kritischen Beanspruchung trennt sich ein aufgeklebter Prüfstempel vom Substrat. Zeitgleich wird ein positionsbezogenes IR-Signal aus dem drehenden Rotor an das Basisgerät gesendet und zusammen mit der Drehzahl an die PC-Software übertragen. Für jede Probe wird die Bruchkraft berechnet und in Echtzeit angezeigt. Der Adhesion Analyser LUMiFrac® untersucht bis zu acht Prüfkörper unter identischen Bedingungen. Das neue Messprinzip erfüllt die Anforderungen von DIN EN 15870, DIN EN 14869-2, ISO 4624 sowie DIN EN 13144.
Die Multiprobentestung ermöglicht schnelle Charakterisierungen von Klebverbindungen. So kann der Effekt einer Plasmabehandlung von Bauteilen auf die Verbundfestigkeit zeitsparend bestimmt werden. Die gezielte Veränderung unterschiedlicher Plasma-Parameter, wie beispielsweise, die Plasmazusammensetzung, der Abstand vom Plasmabrenner zur Oberfläche oder die Verweildauer unter dem Brenner, beeinflußt die Festigkeit des Klebsystems und ist dem LUMiFrac direkt quantifizierbar.
Neben der Festigkeitsbestimmung von Klebverbindungen ist die Haftung von Schichtsystemen ein wichtiger Anwendungsbereich. Ergebnisse für Zug- und Scherbeanspruchung, realisiert mit unterschiedlichen Prüfkörper-Geometrien, werden vorgestellt. Ferner werden verschiedene festigkeitsbeeinflussende Faktoren, wie Prüfgeschwindigkeit oder Substratverformung bei Beanspruchung untersucht
The paper addresses “WHITE LIGHT INTERFERENCE MICROSCOPY, ELLIPSOMETRY, AND INSTRUMENTED INDENTATION TESTING AS REFERENCE PROCEDURES“ and is subdivided in the following sections: 1. Measurement vs. testing vs. reference procedures, 2. White light interference microscopy (WLIM) for determination of step height h, 3. Spectroscopic ellipsometry (SE) for determination of layer thickness d and 4. Instrumented indentation testing (IIT) for determination of indentation hardness HIT. The following points are discussed in more detail: methodology of measurement and testing, uncertainty budgets for direct (WLIM), model-based (SE) and formula-based (IIT) reference procedures by means of specific examples. It is shown that standardization efforts are connected to reference procedures.
Das Vorhaben ZENSUS beschäftigt sich mit der Erstellung eines Normenentwurfs bzw. einer normen-konformen Technischen Spezifikation für die Zentrifugen-basierte Prüfung der Klebfestigkeit von Stumpfklebungen. Das umfasst auch umfangreiche Validierungsversuche, um mögliche Unterschiede zwischen Kraft-gesteuerter (Zentrifuge) und Weg-gesteuerter (Zugprüfmaschine) bzw. ggf. dazu korrelierte Materialabhängigkeiten mit ihren Auswirkungen auf SOPs zu identifizieren. Die Zentri-fugen-basierte Mehr-Proben-Prüfung von bis zu 8 Klebverbunden wird im Weiteren mit CAT-Technologie („Centrifugal Adhesion Testing“) abgekürzt.
Visualisierung von mikro- und nanoskalierten Oberflächenstrukturen mittels abbildender Ellipsometry
(2019)
In den letzten Jahren hat die Einbindung der abbildenden Ellipsometrie in die Gruppe der optischen Verfahren zur Oberflächencharakterisierung ein enormes Potential bei der Analyse von topologischen Strukturänderungen gezeigt. Der dabei abgebildete Kon-trast wurde typischerweise auf Änderungen im Brechungsindex, Absorptionseffekte oder Schichtdickenänderungen zurückgeführt. In späteren Studien wurde festgestellt, dass auch andere Faktoren, wie etwa die Krümmung der Oberfläche oder Kanten von Struktu-ren einen signifikanten Einfluss auf die Messung der ellipsometrischen Paramater haben. Um diese Effekte aus der ellipsometrischen Messung extrahieren zu können, wird auf die Analyse der Müller-Matrix zurückgegriffen.
In dem hier vorliegenden Beitrag wird gezeigt, wie die Müller-Matrix-Imaging Ellipsomet-rie (MM-IE) zur Charakterisierung von Oberflächenstrukturen verwendet werden kann. Dazu werden mikro- und nanoskaliert gekrümmte Oberflächen zunächst mit verschiede-nen Referenzmethoden, wie Rasterelektronenmikroskopie (SEM), Lichtmikroskopie (OM), Weißlichtinterferenzmikroskopie (WLIM) und Rasterkraftmikroskopie (AFM) vali-diert erfasst. Der anschließende Vergleich mit den Ergebnissen der Müller-Matrix-Ima-ging-Ellipsometrie ermöglicht eine Korrelation der zugrunde liegenden Strukturphäno-mene mit den ellipsometrischen Daten. In diesem Artikel wird das Prinzip an drei industriell relevanten Strukturgruppen demonstriert: Sub-Mikropartikel, Mikropartikel und sub-mikroskalierte Vertiefungen.
Visualisierung von mikro- und nanoskalierten Oberflächenstrukturen mittels abbildender Ellipsometrie
(2019)
In den letzten Jahren hat die Einbindung der abbildenden Ellipsometrie in die Gruppe der optischen Verfahren zur Oberflächencharakterisierung ein enormes Potential bei der Analyse von topologischen Strukturänderungen gezeigt. Der dabei abgebildete Kon-trast wurde typischerweise auf Änderungen im Brechungsindex, Absorptionseffekte oder Schichtdickenänderungen zurückgeführt. In späteren Studien wurde festgestellt, dass auch andere Faktoren, wie etwa die Krümmung der Oberfläche oder Kanten von Struktu-ren einen signifikanten Einfluss auf die Messung der ellipsometrischen Paramater haben. Um diese Effekte aus der ellipsometrischen Messung extrahieren zu können, wird auf die Analyse der Müller-Matrix zurückgegriffen.
In dem hier vorliegenden Beitrag wird gezeigt, wie die Müller-Matrix-Imaging Ellipsomet-rie (MM-IE) zur Charakterisierung von Oberflächenstrukturen verwendet werden kann. Dazu werden mikro- und nanoskaliert gekrümmte Oberflächen zunächst mit verschiede-nen Referenzmethoden, wie Rasterelektronenmikroskopie (SEM), Lichtmikroskopie (OM), Weißlichtinterferenzmikroskopie (WLIM) und Rasterkraftmikroskopie (AFM) vali-diert erfasst. Der anschließende Vergleich mit den Ergebnissen der Müller-Matrix-Ima-ging-Ellipsometrie ermöglicht eine Korrelation der zugrunde liegenden Strukturphäno-mene mit den ellipsometrischen Daten. In diesem Artikel wird das Prinzip an drei industriell relevanten Strukturgruppen demonstriert: Sub-Mikropartikel, Mikropartikel und sub-mikroskalierte Vertiefungen.
Commercial grade-1 titanium samples (Ti, 99.6%) were treated using three alternative methods, (i) femtosecond laser processing, (ii) thermal heat treatment, and (iii) electrochemical anodization, respectively, resulting in the formation of differently conditioned superficial titanium oxide layers. The laser processing (i) was carried out by a Ti:sapphire laser (pulse duration 30 fs, central wavelength 790 nm, pulse repetition rate 1 kHz) in a regime of generating laser-induced periodic surface structures (LIPSS). The experimental conditions (laser fluence, spatial spot overlap) were optimized in a sample-scanning setup for the processing of several square-millimeters large surface areas covered homogeneously by these nanostructures. The differently oxidized titanium surfaces were characterized by optical microscopy, micro Raman spectroscopy, variable angle spectroscopic ellipsometry, and instrumented indentation testing. The tribological performance was characterized in the regime of mixed friction by reciprocating sliding tests against a sphere of hardened steel in fully formulated engine oil as lubricant. The specific tribological performance of the differently treated surfaces is discussed with respect to possible physical and chemical mechanisms.
Nowadays the Instrumented Indentation Testing (IIT) is one of the most commonly used methods to determine the mechanical properties of materials in the nano range. This method is already extensive standardized in EN ISO 14577 part 1-4. Because of the great interest of researchers and industries in investigations of time depending material behavior mostly all suppliers of IIT equipment are offering the possibility of dynamic testing. Realizing this development ISO/TC 164/SC3 Hardness Testing has proposed to start the new standardization project “Linear elastic dynamic instrumented indentation testing DIIT”. The development of this standard is accompanied by the first international intercomparing exercise comparing results of dynamic instrumented indentation testing from testing machines using different hardware solutions and different models for data evaluation.
The draft of part 5 of ISO 14577 “Linear elastic dynamic instrumented indentation testing DIIT” specifies verification and calibration of testing machines for carrying out the measurement of the dynamic material response when an oscillatory force or displacement, with amplitudes small in comparison to the prescribed target values, is imparted to the indenter while the indenter is continuously loaded to a prescribed target load or target depth or while the load or displacement is held constant at a prescribed target value. In case of a material showing plastic-elastic behavior, the measured dynamic response is used for continuous evaluation of the dynamic stiffness of the contact as a function of depth and frequency. Using the dynamic stiffness of the contact a reduced dynamic modulus will be calculated. In case of a material showing visco-elastic behavior from the measured dynamic response also the dynamic contact damping coefficient as function of depth and frequency is evaluated continuously. Using dynamic contact stiffness and dynamic contact damping coefficient reduced lost and storage modulus for visco-elastic materials will be calculated.
The main normative requirements of the draft will be presented and discussed in the light of the first results of the intercomparing excise.
In the face of rising energy demand and the impending climate change the development of a sustainable, fossil-free fuel and chemical production is of global importance. One possible goal is the development of electrochemical conversion processes using catalysts. Porous materials play an important role in such energy applications. The key to the development of improved catalysts is a better understanding of the relations between their performance, stability and physico-chemical properties. However, the complex morphology of such catalysts constitutes a challenge even for modern analytical techniques. Spectroscopic ellipsometry (SE) is a versatile method for studying material properties by using appropriate models (e.g. film thickness, optical and electronic properties). The fact that the material properties cannot be taken directly from the measured spectra, the developed models have to be validated. In a first step, the model for the ellipsometric fit studies of a calcination series of mesoporous iridium oxide films (300 – 600 °C) was investigated and validated with respect to their material properties. Moreover, the electronic structures of the catalysts reveal a direct correlation with electrochemical activities. The development of an environmental cell offers the possibility of investigations under real conditions. This will allow changes in the optical and electronic properties during the electrocatalytic oxygen evolution reaction.
In the face of rising energy demand and the impending climate change the development of a sustainable, fossil-free fuel and chemical production is of global importance. One possible goal is the development of electrochemical conversion processes using catalysts. Porous materials play an important role in such energy applications. The key to the development of improved catalysts is a better understanding of the relations between their performance, stability and physico-chemical properties. However, the complex morphology of such catalysts constitutes a challenge even for modern analytical techniques.
Spectroscopic ellipsometry (SE) is a versatile method for studying material properties by using appropriate models (e.g. film thickness, optical and electronic properties). The fact that the material properties cannot be taken directly from the measured spectra, the developed models have to be validated. In a first step, the model for the ellipsometric fit studies of a calcination series of mesoporous iridium oxide films (300 – 600 °C) was investigated and validated with respect to their material properties. Moreover, the electronic structures of the catalysts reveal a direct correlation with electrochemical activities. The development of an environmental cell offers the possibility of investigations under real conditions. This will allow changes in the optical and electronic properties during the electrocatalytic oxygen evolution reaction.
In recent years, the fabrication of laser-generated surface structures on metals such as titanium surfaces have gained remarkable interests, being technologically relevant for applications in optics, medicine, fluid transport, tribology, and wetting of surfaces.
The morphology of these structures, and so their chemistry, is influenced by the different laser processing parameters such as the laser fluence, wavelength, pulse repetition rate, laser light polarization type and direction, angle of incidence, and the effective number of laser pulses per beam spot area.
However, the characterization of the different surface structures can be difficult because of constraints regarding the analytical information from both depth and the topographic artifacts which may limit the lateral and depth resolution of elemental distributions as well as their proper quantification. A promising technique to investigate these structures even at the nano-scale is Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), a very surface sensitive technique that at the same time allows to perform depth-profiling, imaging and 3D-reconstruction of selected ion-sputter fragment distributions on the surface.
In this study we combine chemical analyses such as Energy Dispersive X-ray spectroscopy (EDX) and high-resolution scanning electron microscopy (SEM) analyses with ToF-SIMS to fully characterize the evolution of various types of laser-generated micro- and nanostructures formed on Ti and Ti alloys at different laser fluence levels, effective number of pulses and at different pulse repetition rates (1 – 400 kHz), following irradiation by near-infrared ultrashort laser pulses (925 fs, 1030 nm) in air environment or under argon gas flow.
We show how this combined surface analytical approach allows to evaluate alteration in the surface chemistry of the laser-generated surface structures depending on the laser processing parameters and the ambient environment.
For the vast majority of ellipsometric measurements, the application of planar substrates is mandatory and requires a proper sample alignment prior to the measurement. Here, the authors present a generalized approach of how to extract the isotropic ellipsometric sample parameters from an imaging Mueller-matrix measurement even if the sample is significantly misaligned. They validate the method by layer-thickness calculations based on imaging Mueller-matrix measurements of flat crystalline silicon samples that were misaligned on purpose. Furthermore, they also exploit this method’s capabilities to perform spatially resolved layer-thickness measurements of a single-layer indium-tin-oxide coating on a fused-silica microlens without the need of realignment or repositioning of the sample during the measurement.
Crystalline Silicon undergoes a complex phase-change dynamic of melting, amorphization, ablation and re-crystallization upon irradiation with high intensity ultra-short laser pulses [1]. The final state of such a modified surface spot depends on many factors, most notably the local fluence and the surface’s crystal orientation. In this study, we induced superficial structure and phase changes in Silicon <111> and <100> wafers using single femtosecond laser pulses (790 nm, 30 fs) for a range of different peak fluences. The resulting surface modifications were studied in great detail using a number of different techniques, including spectroscopic imaging ellipsometry (SIE), atomic force microscopy, high-resolution transmission electron microscopy (HRTEM), and energy dispersive X-ray spectroscopy within scanning transmission electron microscopy (STEM-EDX).
Playing a pivotal role in this work, SIE provided non-destructive measurements for the calculation of the radial amorphous layer-thickness profiles of the irradiated spots using a two-layer thin-film model (Silicon dioxide and amorphous Silicon on a crystalline Silicon substrate). The measurements further allowed for the analysis of the oxide-layer modifications induced by the laser treatment. The results of the SIE-calculations were cross-checked by an in-depth material lamella via HRTEM and STEM-EDX.
The paper addresses the “State-of-the-Art in Multiple-Sample Evaluation of Adhesive and Bonding Strength” and the following points are discussed in more detail:
1. Motivation (coatings, varnishes, tapes, laminates, CFRP, adhesive-bonded joints)
2. Conventional single-sample testing (evaluation of adhesive and bonding strength; failure pattern)
3. Multiple-sample handling (MSH), bonding (MSB), and testing: centrifugal adhesion testing (CAT) (multiple-sample approach, tensile test within a centrifuge)
4. Application examples of CAT-Technology™ (laminates, optical coatings, CFRP joints)
Finally, a summary is given regarding status quo and benefits of CAT-technology under tensile stress conditions whereas examples of testing in a centrifuge under compressive stress conditions are mentioned in the outlook.
Ellipsometry has become a powerful measurement tool in semiconductor industry since the sixties of the last century.
Early standardization activities focused exclusively on SiO2/Si (ASTM F 576-01, SEMI 3624). The first generic standard dealing with ellipsometry is DIN 50989-1:2018 Ellipsometry – Part 1: Principles. Standardization is a prerequisite for accreditation according to DIN EN ISO/IEC 17025 and the evaluation of uncertainty budgets.
The talk addresses the STANDARDIZATION OF ELLIPSOMETRY and the following points are discussed in more detail: historical background of ellipsometry, history of International Conferences on Ellipsometry, Workshops Ellipsometry in Germany and Europe, information on German/European Working Group Ellipsometry, technical/industrial importance of ellipsometry, applications on non-ideal material systems and standardization activities on ellipsometry.
Thin mesoporous metal oxide films are versatile and attractive candidates for several energy applications like photovoltaics, electrolysis or batteries. Due to their high surface area and ordered pore structure, mesoporous metal oxides demonstrate higher activities. The performance of the porous films is affected by properties like size and shape of the mesopores as well as the crystallinity of the framework. The exact determination and metrological evaluation of the complex morphology of thin mesoporous films requires a new analytical approach employing to combined data of different analytical methods. In this contribution we present a novel evaluation procedure for spectroscopic ellipsometry (SE) to analyse thin mesoporous iridium oxide films.
Mesoporous iridium oxide films were prepared via dip-coating of a solution containing a triblock-copolymer as structure directing agent and an iridium precursor in ethanol. Deposited films were calcined in air at temperatures between 300 and 600 °C. Their morphology was studied with SEM and an electron probe microanalysis (EPMA) and correlated via SE with a Bruggeman effective medium approximation (BEMA). The developed SE model described the film thickness as well as the porosity.
...
The contribution will assess in detail the novel approach to analyse the morphology and porosity of thin metal oxide films with spectroscopic ellipsometry. Moreover, the advantages of the new developed approach will be discussed as well as combination of datasets from multiple measurements to development new methods for innovative energy technologies.
Thin mesoporous metal oxide films are versatile and attractive candidates for several energy applications like photovoltaics, electrolysis or batteries. Due to their high surface area and ordered pore structure, mesoporous metal oxides demonstrate higher activities. The performance of the porous films is affected by properties like size and shape of the mesopores as well as the crystallinity of the framework. The exact determination and metrological evaluation of the complex morphology of thin mesoporous films requires a new analytical approach employing to combined data of different analytical methods. In this contribution we present a novel evaluation procedure for spectroscopic ellipsometry (SE) to analyse thin mesoporous iridium oxide films. Mesoporous iridium oxide films were prepared via dip-coating of a solution containing a triblock-copolymer as structure directing agent and an Iridium precursor in ethanol. Deposited films were calcined in air at temperatures between 300 and 600 °C. Their morphology was studied with SEM and an electron probe microanalysis (EPMA) and correlated via SE with a Bruggeman effective medium approximation (BEMA). The developed SE model described the film thickness as well as the porosity.
... The contribution will assess in detail the novel approach to analyse the morphology and porosity of thin metal oxide films with spectroscopic ellipsometry. Moreover, the advantages of the new developed approach will be discussed as well as combination of datasets from multiple measurements to development new methods for innovative energy technologies.
Thin mesoporous metal oxide films are versatile and attractive candidates for several energy applications like photovoltaics, electrolysis or batteries. Due to their high surface area and ordered pore structure, mesoporous metal oxides demonstrate higher activities. The performance of the porous films is affected by properties like size and shape of the mesopores as well as the crystallinity of the framework. The exact determination and metrological evaluation of the complex morphology of thin mesoporous films requires a new analytical approach employing to combined data of different analytical methods. In this contribution we present a novel evaluation procedure for spectroscopic ellipsometry (SE) to analyse thin mesoporous iridium oxide films.
Mesoporous iridium oxide films were prepared via dip-coating of a solution containing a triblock-copolymer as structure directing agent and an iridium precursor in ethanol. Deposited films were calcined in air at temperatures between 300 and 600 °C. Their morphology was studied with SEM and an electron probe microanalysis (EPMA)and correlated via SE with a Bruggeman effective medium approximation (BEMA). The developed SE model described the film thickness as well as the porosity.
Figure 1a shows a top-view SEM image of mesoporous IrO2 film calcined at 375 °C. The image reveals that the films exhibit a well-ordered mesopore structure with an average pore diameter of 16 nm and a periodic distance between pore centres of 24 nm (FFT inset). Figure 1b is a parity plot of film thicknesses determined by cross-section SEM versus SE of IrO2 film samples prepared at different calcination temperatures. The porosity from the SE model is in good agreement to the porosity values obtained by EPMA.
The contribution will assess in detail the novel approach to analyse the morphology and porosity of thin metal oxide films with spectroscopic ellipsometry. Moreover, the advantages of the new developed approach will be discussed as well as combination of datasets from multiple measurements to development new methods for innovative energy technologies.
Porous materials play an important role in several fields of technology, especially for energy applications like photovoltaics, electrolysis or batteries. The activity of porous films is affected by properties like porosity, film thickness, chemical composition of the material as well as the crystallinity of the framework. The complex morphology of such porous films constitutes a challenge for modern analytical techniques and requires approaches employing the combination/complementation of data of different analytical methods. In this contribution we characterize thin mesoporous iridium-titanium mixed oxide film properties by spectroscopic ellipsometry (SE).
Mesoporous iridium oxide - titanium oxide (IrOx-TiOx) films were prepared via dip-coating of a solution containing a triblock-copolymer as structure-directing agent, an iridium precursor as well as a titanium precursor in ethanol. Deposited films with different amounts of iridium (0 wt%Ir to 100 wt%Ir) were synthesized and calcined in air. The thin films were analyzed with SE using the Bruggeman effective medium approximation (BEMA) for modelling. The results were compared with electron probe microanalysis (EPMA) as part of a combined SEM/EDS/STRATAGem Analysis.
Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon
(2021)
Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn.
Silicon is the material responsible for most of the technological developments during the past century, making it one of the most studied materials along different disciplines. However, there are still unturned stones regarding its superficial re-solidification after femtosecond laser-induced local melting. In this presentation, we report irradiation experiments with single femtosecond pulses (790 nm, 30 fs) with a spatially Gaussian distribution on two different types of silicon with orientations <111> and <100>. The surface modifications were studied in detail via different techniques, including optical microscopy, atomic force microscopy, spectroscopic imaging ellipsometry, energy dispersive X-ray spectroscopy and high-resolution transmission electron microscopy. We quantitatively estimate the resulting radial amorphous layer depth profiles with maximum thicknesses around some tenths of nanometers for fluences in between the melting and ablation thresholds. In particular, spectroscopic imaging ellipsometry (SIE) allowed fast data acquisition using multiple wavelengths to provide experimental measurements for calculating the nanometric radial amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. SIE proved to be capable of detecting and measuring nanometric structural and chemical modifications (oxidation) on the studied laser spots. The accuracy of the SIE-based calculations is verified experimentally by characterizing an in-depth material lamella via high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). For completeness, we present a mathematical modelling for the melt layer thickness considering different optical absorption processes including one photon absorption, two photon absorption and free-carrier absorption, highlighting the relevance of the latter one in the femtosecond laser-induced melting of silicon.
Deep understanding of the effects associated with fabrication parameters and their influence on the resulting structures shape is essential for the further development of direct laser writing (DLW). In particular, it is critical for development of reference materials, where structure parameters are precisely fabricated and should be reproduced with use of DLW technology. In this study we investigated the effect of various fabrication and preparation parameters on the structural precision of interest for reference materials. A well-studied photo-curable system, SZ2080 negative photo-resist with 1 wt.% Michler's ketone (Bis) photo-initiator, was investigated in this work. The correlation between applied laser power, laser velocity, fabrication direction on the deviations in the structure shape were observed by means of white light interferometry microscopy. Moreover, influence of slicing and hatching distances as well as prebake time were studied as function of sample shape. Deviations in the structure form between the theoretically expected and the one detected after DLW fabrication were observed in the range up to 15%. The observed shape discrepancies show the essential importance of fine-tuning the fabrication parameter for reference structure production.
3D coherence scanning interferometry (CSI) is anoptical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. White light interference microscopy (WLIM) providest here-dimensional surface topometry data up to a resolution of 0.4 µm lateral and 0.1 nm vertical. Three operating modi, surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness. Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.
The oxides, hydroxides, and oxo-hydroxides of iron belong to the most abundant materials on earth. They also feature a wide range of practical applications. In many environments, they can undergo facile phase transformations and crystallization processes.
Water appears to play a critical role in many of these processes. Despite numerous attempts, the role of water has not been fully revealed yet. We present a new approach to study the influence of water in the crystallization and phase transformations of iron oxides.
The approach employs model-type iron oxide films that comprise a defined homogeneous nanostructure. The films are exposed to air containing different amounts of water reaching up to pressures of 10 bar. Ex situ analysis via scanning electron microscopy, Transmission electron microscopy, selected area electron diffraction, and X-ray diffraction is combined with operando near-ambient pressure X-ray photoelectron spectroscopy to follow water-induced changes in hematite nd ferrihydrite. Water proves to be critical for the nucleation of ematite domains in ferrihydrite, the resulting crystallite orientation, and the underlying crystallization mechanism.
Proposal for revision of en 15870 „Adhesives determination of tensile strength of butt joints”
(2021)
The paper addresses the PROPOSAL FOR REVISION OF EN 15870
„ADHESIVES -DETERMINATION OF TENSILE STRENGTH OF BUTT JOINTS” “ and the follow points are discussed in more detail: Adhesives-Determination of tensile strength of butt joints, Introduction of Centrifugal Adhesion Testing, Comparison of Testing Methods.
Der Vortrag gibt den aktuellen Stand der Normung im Bereich der Oberflächentechnik insbesondere der Oberflächenanalytik und der Oberflächenmess- und -prüftechnik wider. Vorgestellt wird der Status technischer Berichte, Normenentwürfe und Normen u.a. zur Bewertung von Auflösung und Schärfe mit strahlbasierten Methoden im Nanometer- und Mikrometerbereich, zur Messung von Schichtdicken und Nanopartikeln in kritischen Dimensionen einschließlich Größen- und Formverteilungen mittels REM, zur Messung der Schichtdicke von Nanomaterialien und zur Klassifizierung von Kohlenstoffschichten mittels Ellipsometrie, zur Standardisierung der Ellipsometrie, zur Kalibrierung von Konfokalmikros-kopen für die Formmessung, zur linear elastisch dynamischen instrumentierten Eindringprüfung, zur Messung der flächenbezogenen Masse mittels AAS und ICP, zur Schichtpotentialmessung von Mehrfach-Nickelschichten, zur Schichtdicken und Flächen-widerstandsbestimmung sowie zur Bestimmung der Schichthaftung mittels Zentrifugentechnologie.
Der Vortrag gibt den aktuellen Stand der Normung im Bereich der Oberflächen-technik insbesondere der Oberflächenanalytik und der Oberflächenmess- und -prüftechnik wider. Vorgestellt wird der Status technischer Berichte, Normenentwürfe und Normen u.a. zur Charakterisierung von funktionellen Glasoberflächen für bioanalytische Anwendungen, zur Messung der Schichtdicke von Nanomaterialien mittels Ellipsometrie, zur Kalibrierung von Interferometern und Interferenzmikroskopen für die Formmessung, zur Rockwelleindringprüfung zur Bewertung der Schicht-haftung, zu den Grundlagen der Ellipsometrie, zur Messung der Schichtdicke mittels Wirbelstromverfahren, zur Schichtpotentialmessung von Mehrfach-Nickelschichten, zu Filtern und Augenschutzgeräten gegen Laserstrahlung sowie zur Bestimmung der Schichthaftung mittels Zugversuch.
Bonding strength is crucial on polymers of low surface energy, for clean surfaces limited to 0.5, 1, and 2 MPa for PTFE, PP, and PE. Plasma treatment may improve bonding strength by a factor of 2 (PTFE) or 5 (PP and PE). The efficiency of treatment is usually 10% as both low pressure and atmospheric pressure processes show low topographic conformity.
Besides, lifetime of activation/modification is rather short. Hence, bonding has to be carried out immediately after plasma treatment.
The concept of plasma-assisted ALD (atomic layer deposition) interlayers was introduced in the project HARFE of SENTECH (modification/deposition/in-situ monitoring) and BAM (bonding, characterization, testing). ALD deposition has a high surface conformity and for dielectric films of Al2O3 also a good long-term stability given that the films are dense enough.
Based on TMA and O2/O3 precursors, ALD layer stacks from 60 to 375 monolayers were prepared under different conditions. For a transfer time of 24 hours from deposition to measurement, bonding strength could be increased up to 5 MPa (PTFE) respectively 10 MPa (PP, PE). The huge potential of ALD layers as adhesive interlayers was demonstrated for Al2O3 on stainless steel with bonding strength beyond 15 MPa, i.e. interface
strength within the ALD stack is also in this range.
This is a prerequisite for subsequent PVD/CVD-deposition in hybrid systems. By means of the SI ALD LL system of SENTECH thermal and plasma-supported ALD processes can be alternatively realized.
Ellipsometric in-situ monitoring provides monolayer sensitivity and reveals that the efficient bonding of the lower ALD layers on the polymer has to be further improved. Testing of bonding strength was realized by CAT (centrifugal adhesion testing) technology. It was shown that ALD modification correlates with the increase of surface energy and bonding strength.
The application of PVD-coatings ranges from mechanical engineering, i.e. thicker tribological coatings, to precision optics, i.e. thinner optical coatings. For physical vapor deposition (PVD) technologies such as evaporation, sputtering, ion beam assisted/driven deposition, vacuum is a prerequisite for two reasons: at first process-related ones (evaporation source, plasma discharge, and mean free path) and at second coating-related ones (pure, perfect, and dense films). Usually, the goal is a homogenous coating of defined stoichiometry and micro-structure without any imperfection.
However, the implementation of micro- or nano-particles may occur accidentally or delibe-rately. Independent of the particle origin, there are two fundamental rules regarding coating functionality: at first, the larger the particle diameter to coating thickness ratio the more affected the functionality of the coating, and at second, the larger the material contrast in terms of the functional feature of interest the more affected the coating performance. Hence, embedded particles have to be avoided for the majority of thin films by all means. The unintended implementation of particles usually results in a malfunction of the coating from the beginning or is at least considered as a weak point of the coating creating a time-dependent defect under service conditions. The intended implementation of particles on surfaces and in coatings may create add-on features, topographic ones and functional ones, however, the facts mentioned hold true.
Examples of particle-initiated coating defects are demonstrated in dependence on the origin and the field of application. Strategies for deliberate attachment/embedding of particles on surfaces/in coatings are discussed regarding process compatibility and coating integrity. For industrial applications, both the validation of process compatibility of particle injection and the plasma resistance of particles under vacuum and plasma conditions have to be confirmed. Further points of interest are the homogeneity of particle distribution and the avoidance of particle agglomeration which is still a crucial point for dry dispersed particles. So far, technical applications are limited to PVD hybrid coatings, plasma dispersion coatings are still a challenge except for applications where homogeneity is not required as in case of product authentication.
ZnSnOx coatings were deposited from two 2in magnetron targets made of
ZnO and SnO2 connected to DC pulsed and RF power supplies, respectively.
The pure Ar and reactive gas mixture Ar/O2 were used. DC pulsed power applied on ZnO target was kept constant 50W 50kHz, 20% d.c. and the RF power applied on SnO2 target was set to values from 0W (pure ZnO deposited) up to 150W (up to 8 at.% of Sn in films). The deposited films were investigated by multiple techniques as deposited at RT as well as after annealing at temperatures 200o C and 450o C. The lower annealing temperature is still compatible with many of common polymeric substrates.
The amount of Sn in the films is proportional to applied RF power on SnO2 target. But there is also significant influence of the post Deposition annealing on the film compositions. The ratio Zn/Sn is reduced by the annealing process. Therefore the annealing is promoting the migration of Sn toward the surface and Zn to inside. Moreover the films deposited in oxygen rich reactive gas mixture does not reduces the resistivity with added Sn in contrary to films deposited in Ar where the resistivity was reduced by 5 orders of magnitudes. The plasma parameters were investigated and mean energies of dominant species were in DC pulsed only about 3eV and DC + RF powered plasma up to 15eV. The expected higher energetic particles in the RF influenced plasma deliver an additional energy to the growing film. Therefore, we observed systematic differences between refractive indexes in the films deposited with low RF powered SnO2 magnetron at RT and post-annealed at 200 ° and practically no difference between RT and post-annealed film at higher RF power above 50 W. The XRD results proved the transitions from an amorphous to more crystalline structure by post-annealing of the films.
Hydrogen production via water electrolysis will be an essential cornerstone in development of sustainable, fossil-free fuel and chemical production on a global scale. The activity and stability of each catalyst is highly dependent on the properties of the coating, i.e., phase composition, crystallinity, accessible surface area, and many other factors. The key to developing improved catalysts is a better understanding of the relationships between their performance, stability, and physicochemical properties. However, these relationships can be complex and are also strongly influenced by the reaction environment. Therefore, operando analysis of the catalyst material during catalysis at realistic potentials and current densities is highly desirable. However, many analytical techniques cannot be applied in liquid environments at realistic potentials and current densities.
We propose environmental ellipsometric analysis in a dedicated electrochemical flow cell as a method to evaluate gas evolution reactions operando under realistic working conditions. Figure 1 illustrates schematically the developed technique. Key factors to success are highly active model-type catalysts, a suitable sample environment, and a deep understanding of the appropriate model development, as well as concise cross validation with numerous other analytical techniques.
The method was developed and validated by analyzing a calcination series (300 – 600 °C) of mesoporous templated IrOx films ex-situ and operando under oxygen evolution reaction (OER) conditions. The employed environmental electrochemical spectroscopic ellipsometric (ECSE) analysis revealed during OER the change of optical and electronic properties, i.e. the dielectric functions, resistivity and band-to-band transitions (p-d band transitions). Film thickness and porosity were validated by means of scanning electron microscopy (SEM), X-ray reflectometry (XRR) or ellipsometric porosimetry (EP), electrical and electronic properties by means of conductivity measurements, X-ray photoelectron spectroscopy (XPS) or UV-Vis-NIR absorption spectroscopy. The electronic structures of the catalysts from valence electron energy loss spectra (VEELS) derived from ε1 and ε2 from SE measurements reveal a direct correlation with electrochemical activities in OER.
In the presentation reversible and irreversible potential-dependent changes of the catalyst properties during operation will be discussed along with the dynamics of gas formation, transport and dissolution at different potentials.
Rising energy demand and the impending climate change require the development of a sustainable, fossil-free fuel and chemical production on a global scale. Hydrogen production via water electrolysis will be a fundamental cornerstone in this endeavor. The activity and stability of respective electrode coatings strongly depends on the coating's properties, i.e. phase composition, crystallinity, electrical conductivity, accessible surface, wettability and many other factors. The key to the development of improved catalysts is a better understanding of the relations between their performance, stability and physicochemical properties. However, those relations can be complex, and are strongly influenced also by the reaction environment. Hence, operando analysis of the catalyst material during catalysis at realistic potentials and current densities is highly desirable. Yet, many analytical techniques cannot be applied in liquid environments at realistic potentials and current densities.
We propose environmental ellipsometric analysis in a dedicated electrochemical flow cell as a new method to evaluate gas evolution reactions operando under realistic working conditions. Figure 1 illustrates schematically the developed technique. Key factors to success are highly active model-type catalysts with template-controlled porosity, a suitable sample environment, a deep understanding of the spectroscopic method and respective model development, as well as concise cross validation with numerous other analytical techniques.
The method was developed and validated by analyzing a calcination series (300 - 600°C) of mesoporous templated IrOx films ex-situ and operando under oxygen evolution reaction (OER) conditions. The employed environmental electrochemical spectroscopic ellipsometric analysis (ECSE) revealed during OER the change of optical and electronic properties, i.e. the dielectric functions (real ε1 and imaginary part ε2), electrical and electronic properties such as resistivity (ρ) and band-to-band transitions (p-d band transitions). Film thickness and porosity were validated by means of scanning electron microscopy (SEM), X-ray reflectometry (XRR) or ellipsometric porosimetry (EP), electrical and electronic properties by means of conductivity measurements, X-ray photoelectron spectroscopy (XPS) or UV-Vis-NIR absorption spectroscopy. The electronic structures of the catalysts from valence electron energy loss spectra (VEELS) derived from the real (ε1) and imaginary part (ε2) of the dielectric function from SE measurements reveal a direct correlation with electrochemical activities in OER.
In the presentation reversible and irreversible potential-dependent changes of the catalyst properties during operation will be discussed along with the dynamics of gas formation, transport and dissolution at different potentials.
Rising energy demand and the impending climate change require the development of a sustainable, fossil-free fuel and chemical production on a global scale. Hydrogen production via water electrolysis will be a fundamental cornerstone in this endeavor. The activity and stability of respective electrode coatings strongly depends on the coating's properties, i.e. phase composition, crystallinity, electrical conductivity, accessible surface, wettability and many other factors. The key to the development of improved catalysts is a better understanding of the relations between their performance, stability and physicochemical properties. However, those relations can be complex, and are strongly influenced also by the reaction environment. Hence, operando analysis of the catalyst material during catalysis at realistic potentials and current densities is highly desirable. Yet, many analytical techniques cannot be applied in liquid environments at realistic potentials and current densities.
We propose environmental ellipsometric analysis in a dedicated electrochemical flow cell as a new method to evaluate gas evolution reactions operando under realistic working conditions. Figure 1 illustrates schematically the developed technique. Key factors to success are highly active model-type catalysts with template-controlled porosity, a suitable sample environment, a deep understanding of the spectroscopic method and respective model development, as well as concise cross validation with numerous other analytical techniques.
The method was developed and validated by analyzing a calcination series (300 - 600°C) of mesoporous templated IrOx films ex-situ and operando under oxygen evolution reaction (OER) conditions. The employed environmental electrochemical spectroscopic ellipsometric analysis (ECSE) revealed during OER the change of optical and electronic properties, i.e. the dielectric functions (real ε1 and imaginary part ε2), electrical and electronic properties such as resistivity (ρ) and band-to-band transitions (p-d band transitions). Film thickness and porosity were validated by means of scanning electron microscopy (SEM), X-ray reflectometry (XRR) or ellipsometric porosimetry (EP), electrical and electronic properties by means of conductivity measurements, X-ray photoelectron spectroscopy (XPS) or UV-Vis-NIR absorption spectroscopy. The electronic structures of the catalysts from valence electron energy loss spectra (VEELS) derived from the real (ε1) and imaginary part (ε2) of the dielectric function from SE measurements reveal a direct correlation with electrochemical activities in OER.
In the presentation reversible and irreversible potential-dependent changes of the catalyst properties during operation will be discussed along with the dynamics of gas formation, transport and dissolution
Ziel des Projektes HARFE (Haftfestigkeit Reproduzierbarkeit Festigkeit) war es, eine Er-höhung der Haft- bzw. Klebfestigkeit auf Niedrigenergie-Polymeren (PE, PP, PTFE) zu erreichen. SENTECH realisierte dazu plasmachemische Oberflächenaktivierungen mit O2 und die Abscheidung von Aluminiumoxidschichten (Al2O3) mittels Atomic Layer Deposition (ALD), wobei die Ellipsometrie zum in-situ Monitoring der ALD-Prozesse diente. Die BAM charakterisierte die modifizierten Oberflächen bezüglich der Oberflächenenergie (OFE) und bestimmte die Verbund- bzw. Klebfestigkeit mittels der Zentrifugentechnologie
Ziel des Projektes HARFE (Haftfestigkeit Reproduzierbarkeit Festigkeit) war es, eine Er-höhung der Haft- bzw. Klebfestigkeit auf Niedrigenergie-Polymeren (PE, PP, PTFE) zu erreichen. SENTECH realisierte dazu plasmachemische Oberflächenaktivierungen mit O2 und die Abscheidung von Aluminiumoxidschichten (Al2O3) mittels Atomic Layer Deposition (ALD), wobei die Ellipsometrie zum in-situ Monitoring der ALD-Prozesse diente. Die BAM charakterisierte die modifizierten Oberflächen bezüglich der Oberflächenenergie (OFE) und bestimmte die Verbund- bzw. Klebfestigkeit mittels der Zentrifugentechnologie
The quantitative determination of adhesion and cohesion properties is a key requirement for adhesive-bonded joints and coated components in both R&D and Quality assurance. Because of the huge variety of layer/substrate Systems in terms of materials and large thickness range, adhesion tests display the same diversity as layer/substrate systems. There are only two tensile testing procedures available, that determine adhesive strength in terms of force per area (N/mm²), the single-sample pull-off test in a tensile testing machine and the multiple-sample-test using the Centrifugal Adhesion Testing (CAT) Technology.
The CAT Technology is a testing method which uses centrifugal force as tensile testing force in a multiple-sample arrangement within a drum rotor of a Desktop centrifuge. Hence, the adhesive/bonding strength A/B can be determined on a statistical basis under identical testing conditions for up to eight samples.
A variety of examples for bonding strength of adhesives, adhesive strength of coatings and compound strength of composite materials is discussed such as metalto-metal and glass-to-metal bonding, sputtered SiO2-layers on CR39 Polymer and carbon fiber reinforced polymer.
Surface analysis is still gaining importance, as most modern technology is in essence surface and thin film technology. In microelectronics and optics but also in many fields of energy storage and conversion, thin surface layers or structured surfaces are key components. Optical surface measurements are useful because of their reliability, robustness, and scalability – properties, which are especially desirable in a production environment. However, many of these methods take require considerable effort in data analysis. Spectroscopic ellipsometry (SE) is maybe the prime example of this class of methods. To combine the advantages of SE with metrological trueness and traceability, we combine it in a group of other methods, such as electron microscopy, instrumental surface analysis, X-ray diffraction.
This presentation will give an overview on the principles of SE, its available quantities and the general properties of this measurement technique. Several examples from current and past projects of BAM-6.7 will show how a measurement community involving ellipsometry can benefit many fields of interest, from polymer science to energy applications. In the context of creating a “measurement landscape”, standardisation and standard compliance play an important role. The efforts of BAM in standardisation and accrediting of ellipsometry will be shown demonstrating the possible impact on quality assurance in different fields of technology.
Multi-functional coatings are a key requirement for surface engineering. General demands are adhesion and long-term stability under service conditions. The modification of surfaces by means of PVD-, ECD- or hybrid processes allows an add-on functionalization of surfaces by a huge diversity of materials with both lateral and vertical micro-/nano-designs. This fact is a prerequisite for micro- and sensor-systems in lab-on-chip and sensor-on-chip technology. Two layer-based sensor principles are presented, i.e. surface plasmon resonance enhanced spectroscopic ellipsometry (SPREE) for detection of hazardous gases and magneto-optical sensors on smart-coated fiber Bragg gratings (FBG) for structural health monitoring (SHM).
The interdependence of substrate features, coating properties, and layer design is discussed firstly for gas sensitivity and selectivity of SPREE-sensors and secondly for sensitivity and selectivity of magneto-strictive coatings to mechanical strain or external magnetic fields resulting in an optical displacement of the Bragg wavelength of FBG-sensors. Moreover, generic features such long-term stability, crucial process-related fabrication conditions, and effects of operational and environmental parameters are discussed with respect to the sensor performance. It has been shown that appropriate layer design and adapted selection of layer materials (SnOx/Au, Fe/Ni:SnOx/Au; Ni/NiFe-Cu-Cr) result in improved sensor parameters and may enable new sensor applications.
In the last years, the implementation of imaging ellipsometry in the variety of optical characterization techniques has shown tremendous potential to analyze the topology of surfaces in the lateral dimension. In the later studies, this contrast-rich surface images were affiliated with changes of the refraction indices, Absorption bands or layer thicknesses. However, it was realized that additional factors like curvature or scattering can have a great Impact on the ellipsometric readout of the analyzed system. In this study, we focus on the systematic evaluation of structural anomalies and inhomogenities of several Basic systems. This includes spherical particles as a model for microscopic curved surfaces in a range of 0.25 to 25 μm in diameter. In the macroscopic regime several conventional convex lenses were analyzed. Additional affords were made to generate microscopic concave model systems by applying nanoindentation with a spherical indentation unit. With this method calottes with a depth of 0.04 to 2 μm and radius of 2.5 μm were made. The macroscopic counterpart is delivered by conventional concave lens systems. For all systems, a variety of different bulk materials was investigated. This includes metal oxides, metals and polymers as well as combinations of each by applying coatings on the bulk materials with different layer thicknesses.
To analyze these structural anomalies and inhomogenities properly, Mueller-Matrix imaging ellipsometry is the method of choice to address cross- and depolarization effects that occur due to the curved surfaces.
Supplementary methods were used for an independent characterization of the topological properties of all structural anomalies and inhomogenities. This includes AFM and SEM for the microscopic samples (microparticles and nanoindented holes) and white light interferometry for the macroscopic lenses.
This study results in a systematic screening of different coated and uncoated material systems with a topology that does not fit into conventional ellipsometry and thus is analyzed by Muller-Matrix imaging ellipsometry. This will help in quality control and is a contribution to the understanding of the polarizing effects of non-ideal Systems analyzed by ellipsometry.
Morphology and structure of TixOy nanoparticles generated by femtosecond laser ablation in water
(2018)
In this work femto-second pulsed laser ablation in liquid (PLAL) procedure for the generation of titanium oxide nanoparticles (NP) is reported with the purpose of understanding morphology and structure of the newly generated NPs. Ablation duration was varied for optimization of NP generation processes between 10 and 90 min. Surface morphology of NPs as well as their size and shape (distribution) were analysed by various complementary electron microscopy techniques, i.e. SEM, TSEM and TEM. The crystalline structure of titanium oxide particles was investigated byXRD(two instruments operated in different geometries) and HR-TEM. Concentration of generated titanium oxide NPs in liquid was analysed by ICP-MS. A mix of crystalline (mainly anatase), partly crystalline and amorphous spherical titanium oxide NPs can be reported having a mean size between 10 and 20 nm, which is rather independent of the laser ablation (LA) duration. A second component consisting of irregularly shaped, but crystalline titanium oxide nanostructures is co-generated in the LA water, with more pronounced occurrence at longer LA times. The provenance of this component is assigned to those spherical particles generated in suspension and passing through the converging laser beam, being hence subject to secondary irradiation effects, e. g. fragmentation.
MISTRAL-Müller-Matrix-basierte Identifizierung von Inhomogenitäten und strukturellen Anomalien
(2020)
Mit abbildender Ellipsometrie (imaging ellipsometry: IE) können Nanometer-Beschichtungen/ Degradationen visualisiert und bezüglich Brechungsindex n, Extinktionskoeffizient k und Schichtdicke d charakterisiert werden. Materialseitig werden lokal Homogenität und Isotropie innerhalb eines/mehrerer Bildpunkte (field of analysis: FOA) und messtechnisch global die Ebenheit der Proben bezüglich aller Bildpunkte des Messfeldes vorausgesetzt. Für die Müller-Matrix-basierte abbildende Ellipsometrie (MM-IE), die den optischen Response anisotroper Materialien in jedem Bildpunkt über die bis zu 16 Müller-Matrix-Elemente erfasst, ist dies von besonderer Relevanz. Reale Substrate sind aber oft nicht eben, können lokal Noppen/Mulden (im FOA) aufweisen oder sind global konvex/ konkav im möglichen Messfeld (field of view: FOV) gekrümmt. Diese lokalen/globalen strukturellen Anomalien des Substrats werden schon für die IE messtechnisch/modellseitig oft nicht beherrscht und sind für die MM-IE in der Wirkung auf die MM-Elemente unbekannt. Diese Defizite sollen messtechnisch bzw. modellmäßig behoben und somit die Messung lokal/global gekrümmter Oberflächen ermöglicht werden (MM-CSIE, CS curved surface).
Mechanische, topometrische und optische Charakterisierung von Schichten mit Stand der Normung
(2019)
Der Vortrag „MECHANISCHE, TOPOMETRISCHE UND OPTISCHE CHARAKTERISIERUNG VON SCHICHTEN MIT STAND DER NORMUNG“ widmet sich unterschiedlichen Beschichtungssystemen und deren mechanischer, topometrischer und optischer Charakterisierung. Über die entsprechenden aktuellen Normen wird informiert. Es betrifft Verfahren wie die Instrumentierte Eindringprüfung (IIT), Centrifugal Adhesion Testing, Weißlichtinterferenzmikroskopie, Tastschnittverfahren und Ellipsometrie (SE).
Oberflächenmodifizierte Grundwerkstoffe, insbesondere solche mit funktionellen Schichten, sind in unterschiedlichsten Branchen und Anwendungen anzutreffen. Es werden Quer- und Kalottenschliffe von Einfach- und Mehrschichtsystemen mit Beispielen aus dem Bereich des Korrosions- und Verschleißschutzes sowie dekorativer Anwendungen auf unterschiedlichsten Grundwerkstoffen (X5CrNi1810 Stahl, 100Cr6 Stahl, Hartmetall, ABS und Pappe) vorgestellt. Ebenso vielfältig wie die Grundwerkstoffe sind die Oberflächenmodifizierungen mit Funktionsschichten auf Basis von Nitrierungen, Hartstoffen, diamantähnlichem Kohlenstoff, Metallisierungen und Lackschichten mit Interferenzpigmenten. Neben der Identifikation von Schichtdefekten gilt das Hauptaugenmerk der materialographischen Analyse der Erfüllung der Schichtdickenspezifikation und der Bewertung der Homogenität der Schichtdicke auch bei kritischen Geometrien. Zur Validierung der Schichtdicken- bzw. Längenbestimmung im Querschliff wurde ein Laborvergleichsversuch mit einem Nickel-beschichteten Kupferdraht durchgeführt, den alle der 10 Teilnehmer bestanden.
Eine Grundanforderung an Bauteile ist deren mechanische Integrität, die als Festigkeit (globale Bauteilbeanspruchung) bzw. Tragfestigkeit (lokale Beanspruchung) zu verstehen ist. Die Bauteilfestigkeit wird wesentlich durch das Materialgefüge bestimmt und kann über die Prüfung der Härte des Grundwerkstoffes lokal erfasst werden. Bei Bauteilverbindungen (z.B. Schweißnähte) ist zudem der Übergangsbereich zwischen den Fügeteilen von besonderem Interesse, bei Passungen oder Gleitlagern sind zudem geringe Rauheiten erforderlich, die oft durch mechanische Oberflächen-bearbeitung realisiert werden. Leichtbauweisen können sowohl über hochfeste Stahllegierungen bei geringem Materialeinsatz als auch über Aluminiumlegierungen realisiert werden. Für unterschied-liche Grundwerkstoffe (X2CrNiMo18-14-3, Co-Cr-W-Ni, AlSi10Mg, X5CrNi1810, ferritische Schweiß-nähte) werden an Quer- und Oberflächenschliffen Änderungen im Gefüge, morphologische Besonderheiten, Härteverläufe sowie Änderungen in den Rauheitskennwerten betrachtet, wie sie im Ergebnis mechanischer Oberflächenbearbeitung, bedingt durch den Herstellungsprozess, die Beanspruchung oder den Fügeprozess auftreten. Zur Validierung der Härtebestimmung wurde ein Laborvergleichsversuch an einer MPA-zertifizierten Härtevergleichsplatte und einer 100Cr6 Referenzprobe durchgeführt, den drei bzw. fünf der insgesamt fünf Teilnehmer bestanden.