5 Werkstofftechnik
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- 5 Werkstofftechnik (7) (entfernen)
Structuring of LTCC substrates by a combination of pressure-assisted sintering and hot-embossing
(2015)
A novel technology for the structuring of LTCC surfaces is introduced. The material is shaped in a zero-shrinkage process by embossing a glassy carbon mold into the softened LTCC directly after termination of the shrinkage. Three commercially available LTCC compositions (Ceramtape GC, Heratape CT707, and DP951) were tested. Diverse raised and lowered structures including rings, grids, and characters were fabricated. Different material behavior was observed for the tested compositions. Promising results were achieved with Ceramtape GC. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised characters is demonstrated. Processing of 100 × 100 mm² substrates is possible. DP951 showed very good moldability, but also unwanted material displacement due to evaporating lead. A high displacement capacity but uneven heights of embossed structures were observed on CT707 samples. SEM investigations proved the precise transfer of surface contours from the mold to the LTCC. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot Embossing
(2015)
A novel technology for the structuring of low temperature co-fired ceramic (LTCC) surfaces is introduced. The commercial LTCC Ceramtape GC is shaped in a zero-shrinkage process by embossing a glass-like carbon mold into the softened LTCC during pressure-assisted sintering. Diverse raised and lowered structures including rings, grids, and characters were fabricated. It was found that de-airing of mold cavities is crucial for the molding of embossments. De-airing is possible through pore channels in the LTCC if embossing is performed at intermediate temperatures. The influence of LTCC viscosity on the mold filling behavior during the formation of raised structures is discussed. For accurate molding and proper densification of the LTCC, hot embossing with 0.41 MPa at 775 °C and subsequent heating under load to 850 °C is proposed. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised bars and characters is demonstrated. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
In this work, the effect of the pressure-assisted sintering process on buried thick film resistors integrated in LTCC multilayer has been studied. Four commercial resistor pastes with sheet resistivities between 10 kΩ and 10 MΩ/cm were analyzed. First they were characterized by SEM/EDX, XRD and Laser diffraction to determine composition and particle distribution. The pastes consist of isolating particles and of Ruthenium based particles that are supposed to build the conductive phase. The pastes were screen printed on LTCC green tape (DP 951) and buried in four layer laminates. Sintering was done in two ways, pressureless (PLS) and also pressure-assisted (PAS). The pressureless sintered resistors showed electrical resistance values roughly in the range of the nominal sheet resistivity and only relatively small fluctuation within one sample. The PAS samples on the other hand showed significantly higher resistances and larger deviations. The microstructure of the sintered resistors was again investigated by SEM and XRD. It seems that the resistivity is determined by the ratio of the two Ruthenium phases RuO2 and Pb2Ru2O6.5, where RuO2 has the higher conductivity. Buried resistors cannot be trimmed by a laser to adjust the resistance. But we discovered that a refiring step will reduce and normalize the resistivity of the PAS resistors significantly.
This paper presents, the investigation of tunable components based on LTCC technology, implementing ferroelectric tunable thick-film dielectric. The tunable loaded line phase shifters are fabricated with metal-insulator-metal (MIM) varactors to demonstrate the capabilities of this method for packaging of the tunable components. The MIM varactors consist of one tunable dielectric paste layer that is printed between two silver layers. The tunable ferroelectric paste is optimized for LTCC sintering temperature around 850°C. The phase shifters are fabricated in two different process. They were achieved a figure of merit of 24°/dB (phase shift 192°) at 3 GHz and 18°/dB (phase shift 98°) at 4.4 GHz by using seven unit cells that each unit cell consisting of two MIM varactors.
Die Bestimmung der Partikelgrößenverteilung mittels Laserstreulichtverfahren hat sich bei den verschiedensten Pulvern im Mikrometer- und Submikrometerbereich insbesondere wegen der kurzen Messdauer und des breiten Messbereichs zu einem der führenden Verfahren entwickelt. In den letzten Jahren gab es eine Reihe von gerätetechnischen Weiterentwicklungen durch die Hersteller, die der Tatsache Rechnung tragen, dass die Anwender immer feinere Ausgangsprodukte einsetzen und damit auch charakterisieren wollen. Die aktualisierte Fassung der ISO 13320 von 2009, welche die normative Basis der Methode bildet, gilt grundsätzlich im Größenbereich von 3000 gm bis hinunter zu 0,1 gm. Es sind aber zusätzliche Ausstattungsmerkmale beschrieben, die diesen Bereich unter Umständen erweitern können.
Weltweit gibt es etwa zehn etablierte Hersteller von Lasergranulometern, deren modernste Modelle jeweils über derartige Zusatzeinrichtungen verfügen. Die eingesetzten Geräte unterscheiden sich in ihrem Aufbau damit nicht nur zwischen den einzelnen Herstellern, sondern auch innerhalb verschiedener Gerätegenerationen ein und desselben Herstellers. Hinzu kommt der mathematische Prozess der Konvertierung der gewonnenen Streulichtdaten in eine Partikelgrößenverteilung (Dekonvolution), bei dem die Hersteller verschiedene Ansätze und Glättungsmethoden nutzen. Seit 2004 hat die Bundesanstalt für Materialforschung und -prüfung drei Ringversuche zur Bestimmung der Partikelgrößenverteilung mittels Laserstreulichtverfahren initiiert. Neben dem eigentlichen Zweck - der Eignungsbewertung der teilnehmenden Labore - wurden die erhobenen Daten genutzt, um Aussagen zur Präzision der Ergebnisse zu gewinnen und Ursachen für Abweichungen zu finden.
Die Wiederholbarkeit der Messergebnisse innerhalb der Labore war unabhängig vom eingesetzten Gerätetyp sehr gut und erfüllte die Anforderungen der ISO 13320. Geringe Abweichungen bei der Reproduzierbarkeit wurden nur zwischen Laboren gefunden, die identische Gerätetypen desselben Herstellers verwendeten. Über alle Labore betrachtet, ergaben sich Vergleichstandardabweichungen, die in Abhängigkeit von der Größe der gemessenen