5 Werkstofftechnik
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Several studies have shown that the electron beam (e-beam) can be used to create nanomaterials from microparticles in situ in a TEM. However, attempts to produce gold nanoparticles (NPs) on silicon oxide substrate remained to be accomplished. Here, we show that the production of gold NPs is possible by using the e-beam in a SEM, under a set of parameters. To understand the physical mechanisms leading to the gold NPs, the mechanisms of e-beam induced charging as well as e-beam induced heating of the MPs were discussed. Several hints point to heating as the driving mechanism.