5 Werkstofftechnik
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- Co-firing (1)
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Low-temperature co-fired ceramics (LTCC) are used to fabricate multilayer circuits which are robust in harsh environments. Thick-film technology is well established for the metallization of circuit boards and microsystems. For specific sensor applications, the combination of LTCC and thin-film technology is advantageous to reach higher structure resolutions. Due to the high roughness of as-fired LTCC surfaces compared with silicon-wafers, the deposition of low-defect- films with narrowly specified properties is challenging. There is spare literature about thin films on commercial LTCC comparing different material systems or sintering techniques. For developing thin film sensors on multilayer circuits it is crucial to identify thin-film-compatible commercial LTCC material as well as the crucial surface properties. In this work we evaluate the thin-film capability of different LTCC surfaces.
The as-fired surfaces of free-sintered, constrained-sintered (sacrificial tape), and pressure-assisted sintered commercial LTCCs (DP951, CT708, CT800), as well as respective polished surfaces, were analyzed by tactile and optical roughness measurements and scanning electron microscopy. The thin-film capability of the LTCC surfaces was assessed by sheet resistance and temperature coefficient of resistance (TCR) of deposited Ni thin-film layers. Contrary to the expectations, no correlation between roughness and thin-film capability was found. Ni thin films on constrained sintered DP951 show the lowest sheet resistance and highest TCR within the experimental framework of the as-fired surfaces. The influence of surface morphology on the film properties is discussed.
Thermoelectric generators can be used for energy harvesting by directly transforming a temperature gradient into a voltage. Multilayer generators based on ceramic multilayer technology are an interesting alternative to conventional π-type generators. They exhibit several advantages like high filling factor, possibility of texturing, co-firing of all materials in one single-step, and reduction of production costs due to the high possible degree of automation. But, co-firing of promising oxide thermoelectric materials, Ca3Co4O9 (p-type) and CaMnO3 (n-type), is very challenging due to the large difference in sintering temperature (300 K).
In this work we show the material development of Ca3Co4O9, CaMnO3, and insulation for multilayer generators co-fired under uniaxial pressure at 900 °C. The materials are tailored regarding their sintering behavior, electrical performance and coefficients of thermal expansion. Tape-casting and pressure assisted sintering are applied to fabricate textured Ca3Co4O9. Compared to conventional sintering, pressure assisted sintering increases the strength by the factor 10 and the power factor by the factor of 20. The combination of sintering additives and uniaxial pressure is used to decrease the sintering temperature of CaMnO3 to 900 °C while maintaining acceptable thermoelectric properties.
Different generator designs (unileg and pn-type) were fabricated and analyzed regarding microstructure and thermoelectric performance. A lower level of complexity is beneficial for co-firing and performance. The unileg demonstrators reach 80% of the simulated output power and the power output is highly reproducible between the different demonstrators (99%).