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Low-temperature co-fired ceramics (LTCC) are used to fabricate multilayer circuits which are robust in harsh environments. Thick-film technology is well established for the metallization of circuit boards and microsystems. For specific sensor applications, the combination of LTCC and thin-film technology is advantageous to reach higher structure resolutions. Due to the high roughness of as-fired LTCC surfaces compared with silicon-wafers, the deposition of low-defect- films with narrowly specified properties is challenging. The deposited thin-films are structured either by lift-off or by etching. The latter is less error-prone and thus preferred in industry provided the selected materials allow it. There is spare literature about thin films on commercial LTCC comparing different material systems or sintering techniques. For developing thin-film sensors on multilayer circuits it is crucial to identify thin-film-compatible commercial LTCC material as well as the crucial surface properties. In this work we evaluate the thin-film capability of different LTCC compositions and surface qualities.
To evaluate the influence of the material composition on the thin film capability, 200 nm Ni-thin films were deposited on three different constrained-sintered LTCC (CT708, CT800 and DP951) by electron beam physical vapour deposition. The effect of surface quality was assessed by thin-film deposition on free-sintered, pressure-assisted sintered, and polished DP951. The thin-films were structured by covering corresponding sections with a UV-curable photo resin and subsequent etching of the uncovered surface, leaving behind the desired structure.
The etched Ni-thin films showed high difference in failure rate and sheet resistance regarding the used LTCC-material. DP951 had the lowest sheet resistance and no failure, whereas CT800 had a high sheet resistance and a failure rate of 40 %. These results are correlated with surface roughness of the LTCC, scanning electron micrographs of the deposited thin-films, and the chemical resistance of the LTCC against commonly used etching media. Contrary to the expectations, no correlation between roughness and thin-film capability was found. The LTCC with high failure rate showed a strong chemical attack by the used etching medium. Additionally, the adhesion of thin-films on DP951 is better than on CT708 and CT800.
Low-temperature co-fired ceramics (LTCC) are used to fabricate robust multilayer circuits. Typically, thick-film technology is applied for metallization. For specific sensor applications, thin films are deposited directly on the as-fired LTCC-surface. These deposited thin films are structured either by lift-off or by etching. The latter is less error-prone and thus preferred in industry provided the selected materials allow it.
200 nm Ni-thin films were deposited on three different commercial constrained-sintered LTCC (CT708, CT800 and DP951) by electron beam physical vapour deposition. The thin-films were structured by covering corresponding sections with a UV-curable photo resisn and subsequent etching of the uncovered surface, leaving behind the desired structure. The etched Ni-thin film showed high difference in failure rate and sheet resistance regarding the used LTCC-material. DP951 had the lowest sheet resistance and no failure, whereas the CT800 had a failure rate of 40 %. The LTCC with high failure rate showed a strong chemical attack by the used etching medium. To address this phenomenon, the chemical resistance of the three different commercial LTCC (CT708, CT800 and DP951) against four different commonly used etching media (sulphuric acid, phosphoric acid, aqua regia, and hydrofluoric acid) is investigated. The dissolved ions are analyzed by ICP-OES to correlate the LTCC-composition and its chemical resistance.
Thermoelectric generators can be used for energy harvesting by directly transforming a temperature gradient into a voltage. Multilayer generators based on ceramic multilayer technology are an interesting alternative to conventional π-type generators. They exhibit several advantages like high filling factor, possibility of texturing, co-firing of all materials in one single-step, and reduction of production costs due to the high possible degree of automation. But, co-firing of promising oxide thermoelectric materials, Ca3Co4O9 (p-type) and CaMnO3 (n-type), is very challenging due to the large difference in sintering temperature (300 K).
In this work we show the material development of Ca3Co4O9, CaMnO3, and insulation for multilayer generators co-fired under uniaxial pressure at 900 °C. The materials are tailored regarding their sintering behavior, electrical performance and coefficients of thermal expansion. Tape-casting and pressure assisted sintering are applied to fabricate textured Ca3Co4O9. Compared to conventional sintering, pressure assisted sintering increases the strength by the factor 10 and the power factor by the factor of 20. The combination of sintering additives and uniaxial pressure is used to decrease the sintering temperature of CaMnO3 to 900 °C while maintaining acceptable thermoelectric properties.
Different generator designs (unileg and pn-type) were fabricated and analyzed regarding microstructure and thermoelectric performance. A lower level of complexity is beneficial for co-firing and performance. The unileg demonstrators reach 80% of the simulated output power and the power output is highly reproducible between the different demonstrators (99%).
Thermoelektrische Effekte beschreiben die direkte Verknüpfung von thermischer Energie und elektrischer Energie in Festkörpern. Durch Thermodiffusionsströme entsteht direkt, ohne beweg¬liche Teile, ein elektrisches Feld als Folge einer Temperaturdifferenz. Diese Material-eigenschaft wird durch den Seebeckkoeffizienten beschrieben. Je nach Art der Ladungs¬träger sind die indu¬zierte Spannung und der Seebeckkoeffizient positiv (p-Typ) oder negativ (n-Typ). Thermo¬elek¬trische Effekte lassen sich beispielsweise in Thermo¬elementen zur Temperatur-messung, in Pel¬tierelementen zum Kühlen oder Heizen und in thermo¬elektrischen Generatoren zur Umwandlung von thermischer Energie in elektrische Energie nutzen.
In thermoelektrischen Generatoren werden Schenkel aus p-Typ- und n-Typ-Materialien elek-trisch in Reihe und thermisch parallel verschaltet. Konventionell werden einzelne Schenkel aus Bismut¬tellurid auf ein metallisiertes Substrat gelötet. Man spricht vom π-Typ-Design. Aufgrund auf¬wendiger Fertigung und nicht optimaler Flächennutzung stellt dieses Design nicht die best-mög¬liche Lösung dar. Neben Telluriden gibt es noch andere vielversprechende thermoelektrische Material¬systeme wie die oxidischen Thermoelektrika. Im Temperatur¬bereich oberhalb von 700 °C können oxidische thermoelektrische Materialien mit nichtoxidischen konkurrieren. Zudem sind sie oxidationsbeständig und können aus weniger toxischen und besser verfügbaren Rohstoffen her¬ge¬stellt werden. Da es sich um keramische Materialien handelt, können unter Nutzung der Multi¬layer¬technologie (auch Vielschicht- oder Mehrlagentechnik) Generatoren im Multilayer¬design hergestellt werden. Keramische Multi¬layer¬generatoren sind aufgrund der höheren Leis¬tungs¬dichte, der Möglichkeit der gezielten Texturierung und des hohen möglichen Auto¬mati¬sierungs¬grades des Herstellungs¬prozesses eine viel¬versprechende Alternative zu konven¬tionellen π-Typ-Generatoren. Alle Lagen werden in einem Schritt co-gesintert. Die beiden zum jetzigen Zeit¬punkt wohl viel¬versprechendsten oxi¬dischen Thermoelektrika sind Calcium-cobaltit Ca3Co4O9 als p-Typ und Calciummanganat CaMnO3 als n-Typ. Die Sinter¬tem¬peratur von Ca3Co4O9 ist durch eine Phasenumwandlung bei 926 °C beschränkt. Texturiertes, dichtes Ca3Co4O9 mit einer hohen Festigkeit kann nur über Hei߬pressen hergestellt werden. Das Co-Sintern von Ca3Co4O9 und CaMnO3 war wegen der Tem¬pera¬tur¬differenz von 350 K zwischen den jeweiligen Sinterintervallen bisher nicht möglich. Ziel dieser Arbeit war deshalb die Ent¬wick¬lung von kompatiblen oxidkeramischen Werkstoffen und Folien für thermoelektrische Multilayer-generatoren auf der Basis von Ca3Co4O9 und CaMnO3.
Daraus resultieren vier wesentliche Arbeitspakete. Zunächst die Materialentwicklungen von Ca3Co4O9 (p-Typ) und CaMnO3 (n-Typ) für ein Co-Sintern bei 900 °C mit akzeptablen thermoelek¬trischen Eigenschaften, dann die Entwicklung der weiteren im Generator benötigten Kompo¬nenten wie der Isolationsschicht und abschließend die Fertigung und Bewertung von Demonstra¬toren im Multi¬layer¬design.
Foliengießen und druckunterstütztes Sintern ermöglichen die Herstellung von dichtem, tex-turier¬tem Ca3Co4O9 mit hoher Festigkeit und hohem Leistungsfaktor. Letzterer ist das Produkt der elek¬trischen Leitfähigkeit und dem Quadrat des Seebeckkoeffizienten. Für die elektrische Leit¬fähigkeit zeigte sich in dieser Arbeit ein kombinierter Einfluss von Sinterdichte und Textur. Die thermo¬elektrischen Eigen¬schaften lassen sich somit über die Einstellung der Mikrostruktur gezielt steuern.
Durch die Optimierung der Pulversynthese, die Einführung des Sinteradditives CuO und die Kombi¬nation mit dem druckunterstützten Sintern (7,5 MPa) konnte die Sintertemperatur des CaMnO3 bei gleichbleibendem Leistungsfaktor von 1250 °C auf 950 °C gesenkt werden. Druck-unter¬stütztes Sintern von CaMnO3 ist bei 900 °C möglich, führt aber zu einem Werkstoff mit geringerem Leistungsfaktor, geringerer Dichte und ungenügender Festigkeit.
Zur elektrischen Isolation der beiden thermoelektrischen Materialien wurde ein Glas-Keramik-Kompo¬sit mit hohem Volumenwiderstand und angepasstem Wärmeausdehnungs¬koef¬fizienten ent¬wickelt.
Aus den zu Folien vergossenen thermoelektrischen Materialien, der siebgedruckten Iso¬lations-schicht und der siebgedruckten Metallisierung wurden mittels Multilayertech¬nologie De¬mons-tratoren hergestellt. Neben dem pn-Generator aus Ca3Co4O9 und CaMnO3 wurden auch Unileg-generatoren aus Ca3Co4O9 gefertigt. Bei Unileggeneratoren wird die Komplexität des Aufbaus durch die Verwendung von nur einem thermoelektrischen Material verringert. Die Simulation der Demonstratoren zeigte, dass der pn-Generator aus Ca3Co4O9 und CaMnO3 keine höheren Leis-tungsdichten erbringt als der aus nur Ca3Co4O9 bestehende Unileg¬generator. Auf¬grund des ge-ringen Leistungsfaktors und der geringen Festigkeit des bei 900 °C gesinterten CaMnO3 er¬scheint die Fertigung von pn-Multilayer¬generatoren aus Ca3Co4O9 und CaMnO3 derzeit nicht sinn¬voll. Die Unileg¬generatoren aus Ca3Co4O9 erreichen mit sehr hoher Reproduzier¬barkeit 2 mW/cm² bei einer Temperaturdifferenz von 230 K, dies entspricht 80 % der simulierten elektrischen Leistung. Es handelt sich hierbei um den ersten Machbarkeits¬nachweis zur Herstellung von Multilayer-generatoren auf Basis von texturiertem Ca3Co4O9 mit hohem thermoelektrischem Leistungsfaktor, hoher Dichte und hoher Festigkeit.
Solch thermoelektrische Multilayergeneratoren könnten zukünftig Systeme mit geringen elek-trischen Leistungsanforderungen wie Sensoren autark und nachhaltig mit elektrischer Energie ver¬sorgen.
Low-temperature co-fired ceramics (LTCC) are used to fabricate multilayer circuits which are robust in harsh environments. Thick-film technology is well established for the metallization of circuit boards and microsystems. For specific sensor applications, the combination of LTCC and thin-film technology is advantageous to reach higher structure resolutions. Due to the high roughness of as-fired LTCC surfaces compared with silicon-wafers, the deposition of low-defect- films with narrowly specified properties is challenging. There is spare literature about thin films on commercial LTCC comparing different material systems or sintering techniques. For developing thin film sensors on multilayer circuits it is crucial to identify thin-film-compatible commercial LTCC material as well as the crucial surface properties. In this work we evaluate the thin-film capability of different LTCC surfaces.
The as-fired surfaces of free-sintered, constrained-sintered (sacrificial tape), and pressure-assisted sintered commercial LTCCs (DP951, CT708, CT800), as well as respective polished surfaces, were analyzed by tactile and optical roughness measurements and scanning electron microscopy. The thin-film capability of the LTCC surfaces was assessed by sheet resistance and temperature coefficient of resistance (TCR) of deposited Ni thin-film layers. Contrary to the expectations, no correlation between roughness and thin-film capability was found. Ni thin films on constrained sintered DP951 show the lowest sheet resistance and highest TCR within the experimental framework of the as-fired surfaces. The influence of surface morphology on the film properties is discussed.
Thermoelectric generators can be used as energy harvesters for sensor applications. Multilayer thermoelectric generators (ML-TEGs) are a promising alternative to conventional π-type generators due to their high filling factor, high capability of automated production and the texturing potential during the production process. Calcium cobaltite is a promising thermoelectric oxide (p-type) with highly anisotropic properties. The following study shows the development of a textured unileg ML-TEG using ceramic multilayer technology.
Tape-casting and pressure assisted sintering are applied to fabricate textured calcium cobaltite. Compared to conventional sintering, pressure assisted sintering increases the strength by the factor 10. Thermoelectric properties can be tuned either towards maximum power factor or towards maximum figure of merit depending on the pressure level.
As electrical insulation material, a screen-printable glass-ceramic with high resistivity and adapted coefficient of thermal expansion is developed. From various commercial pastes a metallization with low contact resistance is chosen. The unileg ML-TEG is co-fired in one single step. The demonstrators reach 80% of the simulated output power and the power output is highly reproducible between the different demonstrators (99%). These results provide the first proof-of-concept for fabricating co-fired multilayer generators based on textured calcium cobaltite with high power factor, high density, and high strength.
Thermoelektrische Generatoren können zum „Energy harvesting“ für den autarken Betrieb von bspw. Sensoren eingesetzt werden. Eine interessante Alternative zu den herkömmlichen π-Typ Generatoren sind auf Grund der höheren Leistungsdichte und der guten Automatisierbarkeit thermoelektrische Multilayergeneratoren. Calciumcobaltit ist ein vielsprechendes oxidisches Thermoelektrika (p-Typ) mit stark anisotropen Eigenschaften. Die hier vorgestellte Studie zeigt die Entwicklung von texturierten Unileg-Multilayer-Generatoren mittels keramischer Multilayertechnologie.
Calciumcobaltit wird durch Foliengießen und druckunterstützte Sinterung texturiert. Im Vergleich zur konventionellen Sinterung verbessert sich die Festigkeit um den Faktor 10. Die thermoelektrischen Eigenschaften können je nach verwendetem Druckniveau hinsichtlich maximalem Power Factor oder hinsichtlich maximalem Gütefaktor optimiert werden.
Ein Glaskeramikkomposit wird als Isolationsmaterial mit hohem Volumenwiderstand und angepasstem Wärmeausdehnungskoeffizienten entwickelt. Der Unileg-Multilayer-Generator wird in einem Schritt co-gesintert. Die hergestellten Demonstratoren erreichen 80% der simulierten Output-Leistung. Diese Ergebnisse stellen den ersten Machbarkeitsnachweis für die Herstellung von co-gesinterten Multilayer-Generatoren aus texturiertem Calciumcobaltit mit hohem Power Factor und hoher Festigkeit dar.
Texturing of calcium cobaltite for thermoelectric applications by pressure assisted sintering
(2021)
Thermoelectric materials can convert waste heat directly into electrical power by using the Seebeck effect. Calcium cobaltite (CCO) is considered as a promising thermoelectric p-type oxide for energy harvesting applications at temperatures above 500 °C. The properties and morphology of single-crystal CCO are strongly anisotropic because of its crystal structure of alternating layers of CoO2 and Ca2CoO3. By aligning the plate-like grains, the anisotropic properties of the grains can be assigned to the poly-crystalline parts.
In this study, the combination of tape casting and pressure-assisted sintering is used to texture and densify large scale components (50 cm²). Thereby, the influence of powder preparation and applied pressure during sintering on texturing and thermoelectric properties is investigated.
The analysis of XRD pole figures revealed that tape casting already leads to highly textured CCO. By pressure variation during sintering, the microstructure of CCO can be tailored either toward maximum power factor as required for energy harvesting or toward maximum figure of merit as required for energy recovery. Low pressure lead to a porous microstructure and maximum figure of merit and higher pressure to full densification and maximum power factor. The electrical and thermal conductivity of CCO seem depending on both texture and sinter density.
Thermoelectric generators can be used for energy harvesting by directly transforming a temperature gradient into a voltage. Multilayer generators based on low-temperature co-fired ceramics technology (LTCC) are an interesting alternative to conventional π-type generators. They exhibit several advantages like high filling factor, possibility of texturing, co-firing of all materials in one single-step, and reduction of production costs due to the high possible degree of automation. Pressure-assisted sintering enables the theoretical possibility of co-firing two promising oxide thermoelectric materials: Ca3Co4O9 (p-type) and CaMnO3 (n-type). Due to the large difference in sintering temperature (300 K) the process is very challenging.
In this work we show the material development of Ca3Co4O9, CaMnO3, insulation and metallization for multilayer generators co-fired under pressure at 900 °C. The materials are tailored regarding their sintering behavior, electrical performance and coefficients of thermal expansion. Different generator designs (unileg and pn-type) were fabricated and analyzed regarding crack formation, interaction layers and thermoelectric performance. Simulated stresses during cooling in the multilayers are compared with actual crack formation for different sintering conditions. This study shows that a lower pressure level and a lower level of complexity are beneficial for co-firing and performance.
Thermoelectric materials can convert waste heat directly into electrical power by utilizing the Seebeck effect. Calcium cobaltite (Ca3Co4O9, p-type) and calcium manganate (CaMnO3, n-type) are two of the most promising oxide thermoelectric materials. The performance of these materials is evaluated by the power factor PF = S²∙σ and the figure of merit ZT = (PF ∙ T) / κ, demanding high Seebeck coefficient S, high electrical conductivity σ and low thermal conductivity κ. The latter two are increasing with increasing relative sinter density. According to theory, the relative density of ceramics can be improved by increasing the driving force for sintering. This study investigates different approaches to increase the driving force for sintering of Ca3Co4O9 and CaMnO3 to improve densities and thermoelectric properties.
The following approaches were applied: minimizing the energy input during powder synthesis by calcination, fine milling of the powder, using reaction-sintering without a powder synthesis step, and adding a transient liquid phase by sinter additives.
All different approaches led to an increased densification and thus higher electrical conductivity and higher PF. Thermal conductivity increased as well but not to the same extent. E.g. reaction-sintering increased the densification of Ca3Co4O9 (p-type) and CaMnO3 (n-type). Consequently, the electrical conductivities improved by about 100 % for both oxides leading to superior power factors (PF = 230 µW/mK² for CaMnO3). Although the thermal conductivity increased as well by 8 %, the figures of merit (ZT) were significantly higher compared to conventionally sintered bars. The addition of 4 wt% CuO as a sinter additive to CaMnO3 lowers the sinter temperature from above 1250 °C to below 1100 °C and increases the relative density. Due to the increased density, both electrical conductivity and PF increased by more than 200 % even though the sintering temperature was 150 K lower.